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- W4387677986 abstract "Next-generation lithography techniques such as Extreme Ultraviolet Lithography have started to reach their physical limits and will not be able to meet the requirements of future Post-Moore Era Integrated Circuit chips that will be based on quantum, photonic, and DNA computing. These future chips and the next generation of quantum products will require sub-10nm and even atomic-scale functional features. Promising candidates for atomic and close-to-atomic scale manufacturing include well-established tip-based techniques such as Scanning Tunnelling Microscopy (STM) and Atomic Force Microscopy (AFM), however, they suffer from severely low throughput, although parallel tips have been suggested to increase the throughput. The integration of these techniques with others such as AFM in Scanning Electron Microscopy has created new hybrid techniques that have greatly enhanced the capabilities of the standalone process. On the other hand, higher throughput techniques like atomic layer etching (ALE) suffer from poor process control and defects despite being promising candidates due to the self-limiting nature of the processes. Studies into laser processing techniques are being investigated to test the feasibility of laser beam-based atomic scale precision manufacturing. Furthermore, the recent progress in quantum simulations has promoted the development of the optical tweezer towards atomic scale manufacturing." @default.
- W4387677986 created "2023-10-17" @default.
- W4387677986 creator A5033076833 @default.
- W4387677986 creator A5054438489 @default.
- W4387677986 creator A5071343494 @default.
- W4387677986 date "2023-08-30" @default.
- W4387677986 modified "2023-10-17" @default.
- W4387677986 title "Atomic and Close-to-Atomic Scale Manufacturing: Status and Challenges" @default.
- W4387677986 cites W2094656325 @default.
- W4387677986 cites W2396073886 @default.
- W4387677986 cites W2548529836 @default.
- W4387677986 cites W2554567359 @default.
- W4387677986 cites W2597730944 @default.
- W4387677986 cites W2766835655 @default.
- W4387677986 cites W2883561419 @default.
- W4387677986 cites W2901379001 @default.
- W4387677986 cites W2976963129 @default.
- W4387677986 cites W3040697516 @default.
- W4387677986 cites W4210415984 @default.
- W4387677986 cites W4233595582 @default.
- W4387677986 cites W4244921062 @default.
- W4387677986 cites W4280499627 @default.
- W4387677986 cites W4308307548 @default.
- W4387677986 cites W4320169722 @default.
- W4387677986 cites W4323925788 @default.
- W4387677986 doi "https://doi.org/10.1109/icac57885.2023.10275165" @default.
- W4387677986 hasPublicationYear "2023" @default.
- W4387677986 type Work @default.
- W4387677986 citedByCount "0" @default.
- W4387677986 crossrefType "proceedings-article" @default.
- W4387677986 hasAuthorship W4387677986A5033076833 @default.
- W4387677986 hasAuthorship W4387677986A5054438489 @default.
- W4387677986 hasAuthorship W4387677986A5071343494 @default.
- W4387677986 hasConcept C100460472 @default.
- W4387677986 hasConcept C102951782 @default.
- W4387677986 hasConcept C120665830 @default.
- W4387677986 hasConcept C121332964 @default.
- W4387677986 hasConcept C136525101 @default.
- W4387677986 hasConcept C142724271 @default.
- W4387677986 hasConcept C146024833 @default.
- W4387677986 hasConcept C157764524 @default.
- W4387677986 hasConcept C162117346 @default.
- W4387677986 hasConcept C162996421 @default.
- W4387677986 hasConcept C171250308 @default.
- W4387677986 hasConcept C192562407 @default.
- W4387677986 hasConcept C204223013 @default.
- W4387677986 hasConcept C204787440 @default.
- W4387677986 hasConcept C20788544 @default.
- W4387677986 hasConcept C2779227376 @default.
- W4387677986 hasConcept C41008148 @default.
- W4387677986 hasConcept C49040817 @default.
- W4387677986 hasConcept C520434653 @default.
- W4387677986 hasConcept C53524968 @default.
- W4387677986 hasConcept C555944384 @default.
- W4387677986 hasConcept C62520636 @default.
- W4387677986 hasConcept C66823137 @default.
- W4387677986 hasConcept C71924100 @default.
- W4387677986 hasConcept C76155785 @default.
- W4387677986 hasConceptScore W4387677986C100460472 @default.
- W4387677986 hasConceptScore W4387677986C102951782 @default.
- W4387677986 hasConceptScore W4387677986C120665830 @default.
- W4387677986 hasConceptScore W4387677986C121332964 @default.
- W4387677986 hasConceptScore W4387677986C136525101 @default.
- W4387677986 hasConceptScore W4387677986C142724271 @default.
- W4387677986 hasConceptScore W4387677986C146024833 @default.
- W4387677986 hasConceptScore W4387677986C157764524 @default.
- W4387677986 hasConceptScore W4387677986C162117346 @default.
- W4387677986 hasConceptScore W4387677986C162996421 @default.
- W4387677986 hasConceptScore W4387677986C171250308 @default.
- W4387677986 hasConceptScore W4387677986C192562407 @default.
- W4387677986 hasConceptScore W4387677986C204223013 @default.
- W4387677986 hasConceptScore W4387677986C204787440 @default.
- W4387677986 hasConceptScore W4387677986C20788544 @default.
- W4387677986 hasConceptScore W4387677986C2779227376 @default.
- W4387677986 hasConceptScore W4387677986C41008148 @default.
- W4387677986 hasConceptScore W4387677986C49040817 @default.
- W4387677986 hasConceptScore W4387677986C520434653 @default.
- W4387677986 hasConceptScore W4387677986C53524968 @default.
- W4387677986 hasConceptScore W4387677986C555944384 @default.
- W4387677986 hasConceptScore W4387677986C62520636 @default.
- W4387677986 hasConceptScore W4387677986C66823137 @default.
- W4387677986 hasConceptScore W4387677986C71924100 @default.
- W4387677986 hasConceptScore W4387677986C76155785 @default.
- W4387677986 hasLocation W43876779861 @default.
- W4387677986 hasOpenAccess W4387677986 @default.
- W4387677986 hasPrimaryLocation W43876779861 @default.
- W4387677986 hasRelatedWork W2012716935 @default.
- W4387677986 hasRelatedWork W2018924450 @default.
- W4387677986 hasRelatedWork W2039109053 @default.
- W4387677986 hasRelatedWork W2064679241 @default.
- W4387677986 hasRelatedWork W2068898653 @default.
- W4387677986 hasRelatedWork W2120021986 @default.
- W4387677986 hasRelatedWork W2141625811 @default.
- W4387677986 hasRelatedWork W3121175235 @default.
- W4387677986 hasRelatedWork W4378647859 @default.
- W4387677986 hasRelatedWork W4387328786 @default.
- W4387677986 isParatext "false" @default.
- W4387677986 isRetracted "false" @default.
- W4387677986 workType "article" @default.