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- W44548086 abstract "Direct massively parallel nano patterning of solid surfaces (silicon and borosilicate glass) is accomplished by utilizing the optical field enhancement between the silica nanospheres and substrate, when irradiated with an Nd:YAG laser. Nano-patterns such as hole array or an island array of 300 nm were created on both silicon and glass by using nanospheres of 640 nm diameter. However, for silicon, in addition to the dent array formed at low laser energy, a sombrero-type nano-bump array was produced at higher laser energy due to Marangoni effect. It is found that non-linear absorption of the enhanced field is the primary reason for the creation of nano-features on glass. Also for patterning glass, the contribution of scattering towards field enhancement is minimized by irradiating the spheres from the back side." @default.
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- W44548086 date "2004-01-01" @default.
- W44548086 modified "2023-09-24" @default.
- W44548086 title "NEAR-FIELD ENHANCED MASSIVELY PARALLEL NANOSCALE MODIFICATION OF SOLIDS" @default.
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