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- W45945939 abstract "Providing an estimate of gas damping in MEMS is a complex task since MEMS are fully three dimensional micro-structures which cannot in general be reduced to simple 1D or 2D models and since the gas cannot be treated as a continuum medium at the microscale. This issue is here addressed, focusing on high pressure applications, by means of integral equations and fast solvers implementing a linear incompressible Stokes formulation with slip boundary conditions. Numerical results are validated with experimental data. Extensions to high working frequencies and low pressures are discussed." @default.
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- W45945939 date "2012-01-01" @default.
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- W45945939 title "Fast Stokes Solvers for MEMS" @default.
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- W45945939 doi "https://doi.org/10.1007/978-3-642-25670-7_7" @default.
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