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- W48334039 abstract "This study uses the artificial neural back-propagation network model to detect the outliers in semiconductor machines. The neural network model has the advantages of great precision and effectiveness. This research uses Novellus Vector Machine and its Remote Process Controller RPC function to collect the data. This study detects the gas transmission pressure of chamber. Our experimental results show that three-month period of network training data possesses the best results. We suggest that the prediction and model training be around 3 months." @default.
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- W48334039 date "2014-01-01" @default.
- W48334039 modified "2023-09-27" @default.
- W48334039 title "Using Artificial Neural Back-Propagation Network Model to Detect the Outliers in Semiconductor Manufacturing Machines" @default.
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- W48334039 doi "https://doi.org/10.1007/978-3-319-07467-2_26" @default.
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