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- W50872900 abstract "Abstract The design, fabrication and testing of microfabricated thermal shear stress and temperature sensors are sensors is discussed. The devices are fabricated on a silicon substrate with a platinum sensor element 5 microns wide, 1000-Å thick and of varying length. The electrical leads are comprised of 5000-Å of gold deposited above the platinum sensor metal. The sensing area is isolated from the substrate by a thin membrane of silicon nitride covering a vacuum cavity. Test results are presented confirming the good thermal isolation of the sensor element from the substrate as well as the successful operation of the device." @default.
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- W50872900 date "1999-11-14" @default.
- W50872900 modified "2023-09-26" @default.
- W50872900 title "Measurement of Shear Stress and Temperature Using MEMS Fabricated Sensors" @default.
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- W50872900 doi "https://doi.org/10.1115/imece1999-0272" @default.
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