Matches in SemOpenAlex for { <https://semopenalex.org/work/W52804847> ?p ?o ?g. }
Showing items 1 to 46 of
46
with 100 items per page.
- W52804847 abstract "This paper discusses: integrated micromachinery; porous silicon technology; integrated force-balance microaccelerometer; and carrier-domain magnetometer applications. (LSP)" @default.
- W52804847 created "2016-06-24" @default.
- W52804847 creator A5002301946 @default.
- W52804847 creator A5073987024 @default.
- W52804847 date "1989-09-01" @default.
- W52804847 modified "2023-10-05" @default.
- W52804847 title "Berkeley Sensor and Actuator Center membership" @default.
- W52804847 doi "https://doi.org/10.2172/6837430" @default.
- W52804847 hasPublicationYear "1989" @default.
- W52804847 type Work @default.
- W52804847 sameAs 52804847 @default.
- W52804847 citedByCount "0" @default.
- W52804847 crossrefType "report" @default.
- W52804847 hasAuthorship W52804847A5002301946 @default.
- W52804847 hasAuthorship W52804847A5073987024 @default.
- W52804847 hasBestOaLocation W528048472 @default.
- W52804847 hasConcept C154945302 @default.
- W52804847 hasConcept C172707124 @default.
- W52804847 hasConcept C185592680 @default.
- W52804847 hasConcept C2779463800 @default.
- W52804847 hasConcept C41008148 @default.
- W52804847 hasConcept C8010536 @default.
- W52804847 hasConceptScore W52804847C154945302 @default.
- W52804847 hasConceptScore W52804847C172707124 @default.
- W52804847 hasConceptScore W52804847C185592680 @default.
- W52804847 hasConceptScore W52804847C2779463800 @default.
- W52804847 hasConceptScore W52804847C41008148 @default.
- W52804847 hasConceptScore W52804847C8010536 @default.
- W52804847 hasLocation W528048471 @default.
- W52804847 hasLocation W528048472 @default.
- W52804847 hasOpenAccess W52804847 @default.
- W52804847 hasPrimaryLocation W528048471 @default.
- W52804847 hasRelatedWork W1596801655 @default.
- W52804847 hasRelatedWork W2130043461 @default.
- W52804847 hasRelatedWork W2350741829 @default.
- W52804847 hasRelatedWork W2358668433 @default.
- W52804847 hasRelatedWork W2376932109 @default.
- W52804847 hasRelatedWork W2382290278 @default.
- W52804847 hasRelatedWork W2390279801 @default.
- W52804847 hasRelatedWork W2748952813 @default.
- W52804847 hasRelatedWork W2899084033 @default.
- W52804847 hasRelatedWork W2530322880 @default.
- W52804847 isParatext "false" @default.
- W52804847 isRetracted "false" @default.
- W52804847 magId "52804847" @default.
- W52804847 workType "report" @default.