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- W53648145 endingPage "162" @default.
- W53648145 startingPage "159" @default.
- W53648145 abstract "HfO2 films were grown by reactive dc magnetron sputtering in a gaseous mixture with different O2/Ar ratios. Influence of the O2/Ar ratio on the microstructures, stoichiometry and optical properties of the HfO2 were studied with X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XFS), atomic force microscopy (AEM) and ultraviolet visible spectroscopy (UV-Vis), respectively. The results show that for all O2/Ar ratios, the HfO2 films grown at mom temperature are amorphous. As the O2/Ar ratio decreases, XPS peaks of Hf4ƒ and 01s shift toward a lower binding energy; whereas at high O2/Ar ratio, the HfO2 films are fairly uniform and compact with a high transmissivity in the range of 400 nm~1100nm." @default.
- W53648145 created "2016-06-24" @default.
- W53648145 creator A5032743346 @default.
- W53648145 creator A5034620769 @default.
- W53648145 creator A5046716821 @default.
- W53648145 creator A5082335959 @default.
- W53648145 creator A5060433222 @default.
- W53648145 date "2006-04-24" @default.
- W53648145 modified "2023-09-23" @default.
- W53648145 title "不同氧氩比例对氧化铪（HfO2）薄膜的结构及性能的影响" @default.
- W53648145 hasPublicationYear "2006" @default.
- W53648145 type Work @default.
- W53648145 sameAs 53648145 @default.
- W53648145 citedByCount "0" @default.
- W53648145 crossrefType "journal-article" @default.
- W53648145 hasAuthorship W53648145A5032743346 @default.
- W53648145 hasAuthorship W53648145A5034620769 @default.
- W53648145 hasAuthorship W53648145A5046716821 @default.
- W53648145 hasAuthorship W53648145A5060433222 @default.
- W53648145 hasAuthorship W53648145A5082335959 @default.
- W53648145 hasConcept C113196181 @default.
- W53648145 hasConcept C120665830 @default.
- W53648145 hasConcept C121332964 @default.
- W53648145 hasConcept C144082473 @default.
- W53648145 hasConcept C147789679 @default.
- W53648145 hasConcept C171250308 @default.
- W53648145 hasConcept C175708663 @default.
- W53648145 hasConcept C185592680 @default.
- W53648145 hasConcept C19067145 @default.
- W53648145 hasConcept C191897082 @default.
- W53648145 hasConcept C192562407 @default.
- W53648145 hasConcept C207114421 @default.
- W53648145 hasConcept C22423302 @default.
- W53648145 hasConcept C32891209 @default.
- W53648145 hasConcept C43617362 @default.
- W53648145 hasConcept C46141821 @default.
- W53648145 hasConcept C56052488 @default.
- W53648145 hasConcept C61427134 @default.
- W53648145 hasConcept C62520636 @default.
- W53648145 hasConcept C8010536 @default.
- W53648145 hasConcept C87976508 @default.
- W53648145 hasConceptScore W53648145C113196181 @default.
- W53648145 hasConceptScore W53648145C120665830 @default.
- W53648145 hasConceptScore W53648145C121332964 @default.
- W53648145 hasConceptScore W53648145C144082473 @default.
- W53648145 hasConceptScore W53648145C147789679 @default.
- W53648145 hasConceptScore W53648145C171250308 @default.
- W53648145 hasConceptScore W53648145C175708663 @default.
- W53648145 hasConceptScore W53648145C185592680 @default.
- W53648145 hasConceptScore W53648145C19067145 @default.
- W53648145 hasConceptScore W53648145C191897082 @default.
- W53648145 hasConceptScore W53648145C192562407 @default.
- W53648145 hasConceptScore W53648145C207114421 @default.
- W53648145 hasConceptScore W53648145C22423302 @default.
- W53648145 hasConceptScore W53648145C32891209 @default.
- W53648145 hasConceptScore W53648145C43617362 @default.
- W53648145 hasConceptScore W53648145C46141821 @default.
- W53648145 hasConceptScore W53648145C56052488 @default.
- W53648145 hasConceptScore W53648145C61427134 @default.
- W53648145 hasConceptScore W53648145C62520636 @default.
- W53648145 hasConceptScore W53648145C8010536 @default.
- W53648145 hasConceptScore W53648145C87976508 @default.
- W53648145 hasIssue "2" @default.
- W53648145 hasLocation W536481451 @default.
- W53648145 hasOpenAccess W53648145 @default.
- W53648145 hasPrimaryLocation W536481451 @default.
- W53648145 hasVolume "26" @default.
- W53648145 isParatext "false" @default.
- W53648145 isRetracted "false" @default.
- W53648145 magId "53648145" @default.
- W53648145 workType "article" @default.