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- W54041773 abstract "The useful pumping speed of getters may vary significantly for the various types used and their particular application. Two measurement techniques for measurement of fast and slow gettering rates are described. The measurement technique for rapid gettering (0.5 to 9 1/s) is a dynamic method. Here the getter is activated under vacuum while pumping in competition with a reference vacuum pump of known pumping speed and conductance. Gas flow is maintained with a calibrated leak in the 10/sup -6/ cc/s range. The gas flow to the reference pump is monitored by a continuous scanning quadrupole mass spectrometer. Gas which is not pumped by the reference pump is pumped by the getter sample. The example used is an erbium thin film getter pumping on carbon dioxide for temperatures between 300 and 900/sup 0/C. Sticking coefficients were determined and plotted as a function of Langmuirs of carbon dioxide exposure. The static method is used for measurement of slower pumping rates (10/sup -2/ to 10/sup -5/ 1/s). This technique involved activating the getter and exposing it to a closed chamber of gas in the micron region. The gas in the chamber is monitored by opening a low conductance orifice to a pump andmore » mass spectrometer for a few seconds at intervals of approximately two hours. The example given is a flashless getter powder in a porous stainless steel sheath pumping at ambient temperature. Pumping speed and capacity data are given for hydrogen, carbon dioxide, nitrogen and carbon monoxide.« less" @default.
- W54041773 created "2016-06-24" @default.
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- W54041773 date "1981-01-01" @default.
- W54041773 modified "2023-09-24" @default.
- W54041773 title "Pumping-speed-measurement techniques for getters" @default.
- W54041773 hasPublicationYear "1981" @default.
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