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- W55659615 abstract "Directed assembly is a promising nanolithography to produce a complex structure with small feature size. The chapter first discusses block copolymer lithography to realize the full potential of self-assembled structure. Secondly, programmable three-dimensional lithography using focused-ion-beam and electron-beam chemical-vapor-deposition is described." @default.
- W55659615 created "2016-06-24" @default.
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- W55659615 date "2014-01-01" @default.
- W55659615 modified "2023-09-29" @default.
- W55659615 title "Directed assembly nanolithography" @default.
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- W55659615 doi "https://doi.org/10.1533/9780857098757.287" @default.
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