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- W55715047 abstract "A methodology is presented for the investigation of imperfect epitaxial layers, mainly oxides and ceramics. The data are recorded on a laboratory-built high resolution X-ray diffractometer that allows fast reciprocal space map acquisition even from poorly diffracting materials. The two-dimensional instrumental profile of the diffractometer is evaluated taking into account each optical element in the beam path in order to obtain reliable and useful information from the analysis of the peak profile shapes. Diffraction profiles from the scattering normal to the surface are modelled with a kinematical scattering model based on microstructural and instrumental parameters. The vertical grain size, size distribution and strain variation across the film thickness are recovered by profile simulation. In the direction parallel to the surface the effect of mosaic spread and finite domain size are considered. The mosaicity, as well as the in-plane crystallite size are deduced from profile modelling. Preliminary results are also given concerning the diffraction effects of a possible self-organized microstructure." @default.
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- W55715047 date "2004-01-01" @default.
- W55715047 modified "2023-10-16" @default.
- W55715047 title "Two-Dimensional XRD Profile Modelling in Imperfect Epitaxial Layers" @default.
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- W55715047 doi "https://doi.org/10.1007/978-3-662-06723-9_19" @default.
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