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- W56165058 endingPage "896" @default.
- W56165058 startingPage "892" @default.
- W56165058 abstract "A variety of shadowing techniques have been developed for fabricating simple structures with lines and spaces in the 100 Å linewidth regime. In the basic technique, a smooth vertical step with precisely determined depth is produced in a substrate by reactive ion etching. This step is shadowed at a shallow angle by evaporation in order to deposit material on the vertical wall. The substrate is then etched at normal incidence with an ion beam to remove the thin layer of material outside the step. This leaves a thin rectangular line of material at the step. By alternately evaporating different materials and by adding lithography and etching steps, more complex structures can be made. Applications of these structures in wire grating optical polarizers and the use of long thin wires for studying electron localization are described. Optical polarizers with extinction ratios of nearly 200 to 1 have been made. This demonstrates some of the unique capabilities of the shadowing technique since high quality polarizers require large areas of high aspect ratio ≊100 Å linewidth metal lines." @default.
- W56165058 created "2016-06-24" @default.
- W56165058 creator A5020054798 @default.
- W56165058 creator A5084424624 @default.
- W56165058 date "1981-11-01" @default.
- W56165058 modified "2023-09-29" @default.
- W56165058 title "Application of ≊100 Å linewidth structures fabricated by shadowing techniques" @default.
- W56165058 doi "https://doi.org/10.1116/1.571229" @default.
- W56165058 hasPublicationYear "1981" @default.
- W56165058 type Work @default.
- W56165058 sameAs 56165058 @default.
- W56165058 citedByCount "41" @default.
- W56165058 countsByYear W561650582012 @default.
- W56165058 countsByYear W561650582013 @default.
- W56165058 countsByYear W561650582014 @default.
- W56165058 countsByYear W561650582015 @default.
- W56165058 crossrefType "journal-article" @default.
- W56165058 hasAuthorship W56165058A5020054798 @default.
- W56165058 hasAuthorship W56165058A5084424624 @default.
- W56165058 hasConcept C100460472 @default.
- W56165058 hasConcept C111368507 @default.
- W56165058 hasConcept C120665830 @default.
- W56165058 hasConcept C121332964 @default.
- W56165058 hasConcept C121524040 @default.
- W56165058 hasConcept C125743686 @default.
- W56165058 hasConcept C127313418 @default.
- W56165058 hasConcept C130472188 @default.
- W56165058 hasConcept C142181693 @default.
- W56165058 hasConcept C171250308 @default.
- W56165058 hasConcept C19067145 @default.
- W56165058 hasConcept C192562407 @default.
- W56165058 hasConcept C200274948 @default.
- W56165058 hasConcept C204223013 @default.
- W56165058 hasConcept C2777289219 @default.
- W56165058 hasConcept C2777813233 @default.
- W56165058 hasConcept C2779227376 @default.
- W56165058 hasConcept C49040817 @default.
- W56165058 hasConcept C520434653 @default.
- W56165058 hasConcept C53524968 @default.
- W56165058 hasConcept C82558694 @default.
- W56165058 hasConceptScore W56165058C100460472 @default.
- W56165058 hasConceptScore W56165058C111368507 @default.
- W56165058 hasConceptScore W56165058C120665830 @default.
- W56165058 hasConceptScore W56165058C121332964 @default.
- W56165058 hasConceptScore W56165058C121524040 @default.
- W56165058 hasConceptScore W56165058C125743686 @default.
- W56165058 hasConceptScore W56165058C127313418 @default.
- W56165058 hasConceptScore W56165058C130472188 @default.
- W56165058 hasConceptScore W56165058C142181693 @default.
- W56165058 hasConceptScore W56165058C171250308 @default.
- W56165058 hasConceptScore W56165058C19067145 @default.
- W56165058 hasConceptScore W56165058C192562407 @default.
- W56165058 hasConceptScore W56165058C200274948 @default.
- W56165058 hasConceptScore W56165058C204223013 @default.
- W56165058 hasConceptScore W56165058C2777289219 @default.
- W56165058 hasConceptScore W56165058C2777813233 @default.
- W56165058 hasConceptScore W56165058C2779227376 @default.
- W56165058 hasConceptScore W56165058C49040817 @default.
- W56165058 hasConceptScore W56165058C520434653 @default.
- W56165058 hasConceptScore W56165058C53524968 @default.
- W56165058 hasConceptScore W56165058C82558694 @default.
- W56165058 hasIssue "4" @default.
- W56165058 hasLocation W561650581 @default.
- W56165058 hasOpenAccess W56165058 @default.
- W56165058 hasPrimaryLocation W561650581 @default.
- W56165058 hasRelatedWork W2001798417 @default.
- W56165058 hasRelatedWork W2016342374 @default.
- W56165058 hasRelatedWork W2053190549 @default.
- W56165058 hasRelatedWork W2065404899 @default.
- W56165058 hasRelatedWork W2065431068 @default.
- W56165058 hasRelatedWork W2070089925 @default.
- W56165058 hasRelatedWork W2081334308 @default.
- W56165058 hasRelatedWork W2085237633 @default.
- W56165058 hasRelatedWork W2145603813 @default.
- W56165058 hasRelatedWork W2286317343 @default.
- W56165058 hasVolume "19" @default.
- W56165058 isParatext "false" @default.
- W56165058 isRetracted "false" @default.
- W56165058 magId "56165058" @default.
- W56165058 workType "article" @default.