Matches in SemOpenAlex for { <https://semopenalex.org/work/W564210046> ?p ?o ?g. }
- W564210046 endingPage "388" @default.
- W564210046 startingPage "372" @default.
- W564210046 abstract "Recent progress in experimentally and theoretically understanding interfaces at the atomic level suggest that ultimate electronic systems may one day be fabricated on a single integrated chip. If such elements as Si VLSI processors, GaAs/AIAs integrated optoelectronic 10 devices, II-VI superlattice visible displays and high speed III-V processors are to be integrated, interface formation and in situ processing will be required at a level of sophistication well beyond what is available today. In this paper, we review recent developments in interface formation by both MOCVD and MBE. To illustrate the power of our diagnostic methods, the details of epitaxial interface formation on an atomic scale are reviewed for lattice matched systems (Ge/GaAs/AIAs) and epitaxial silicides (Ni/Si2/Si) as well as oxidation of silicon to form Si/SiO2 interfaces. New developments in using lattice mismatched superlattices with strained layers are discussed for CdTe/ZnTe. Additional complications of growing compound semiconductors on elemental substrates (e.g., anti-phase domains) are discussed for GaAs growth on Si(l00)." @default.
- W564210046 created "2016-06-24" @default.
- W564210046 creator A5011935661 @default.
- W564210046 creator A5045401061 @default.
- W564210046 creator A5052368816 @default.
- W564210046 date "1987-01-01" @default.
- W564210046 modified "2023-09-25" @default.
- W564210046 title "Perspectives on Formation and Properties of Semiconductor Interfaces" @default.
- W564210046 cites W1537667194 @default.
- W564210046 cites W1741840575 @default.
- W564210046 cites W1963887314 @default.
- W564210046 cites W1975861009 @default.
- W564210046 cites W1977169897 @default.
- W564210046 cites W1980134603 @default.
- W564210046 cites W1985991776 @default.
- W564210046 cites W1990249231 @default.
- W564210046 cites W1990455058 @default.
- W564210046 cites W1991096828 @default.
- W564210046 cites W1991607540 @default.
- W564210046 cites W1995866090 @default.
- W564210046 cites W1997025608 @default.
- W564210046 cites W1998820519 @default.
- W564210046 cites W2003846970 @default.
- W564210046 cites W2005350204 @default.
- W564210046 cites W2006021816 @default.
- W564210046 cites W2009921952 @default.
- W564210046 cites W2011879631 @default.
- W564210046 cites W2020803473 @default.
- W564210046 cites W2023740111 @default.
- W564210046 cites W2026356503 @default.
- W564210046 cites W2027789384 @default.
- W564210046 cites W2028131423 @default.
- W564210046 cites W2033768059 @default.
- W564210046 cites W2036040650 @default.
- W564210046 cites W2039390913 @default.
- W564210046 cites W2040502364 @default.
- W564210046 cites W2042489948 @default.
- W564210046 cites W2042886848 @default.
- W564210046 cites W2045417153 @default.
- W564210046 cites W2046164621 @default.
- W564210046 cites W2061590562 @default.
- W564210046 cites W2062046244 @default.
- W564210046 cites W2064555594 @default.
- W564210046 cites W2065127849 @default.
- W564210046 cites W2074486483 @default.
- W564210046 cites W2077520740 @default.
- W564210046 cites W2078565192 @default.
- W564210046 cites W2080916744 @default.
- W564210046 cites W2085190768 @default.
- W564210046 cites W2085953110 @default.
- W564210046 cites W2086601149 @default.
- W564210046 cites W2086936503 @default.
- W564210046 cites W2095176959 @default.
- W564210046 cites W2095413631 @default.
- W564210046 cites W2097489347 @default.
- W564210046 cites W2159597861 @default.
- W564210046 cites W3097299746 @default.
- W564210046 doi "https://doi.org/10.1007/978-3-642-72967-6_28" @default.
- W564210046 hasPublicationYear "1987" @default.
- W564210046 type Work @default.
- W564210046 sameAs 564210046 @default.
- W564210046 citedByCount "1" @default.
- W564210046 crossrefType "book-chapter" @default.
- W564210046 hasAuthorship W564210046A5011935661 @default.
- W564210046 hasAuthorship W564210046A5045401061 @default.
- W564210046 hasAuthorship W564210046A5052368816 @default.
- W564210046 hasBestOaLocation W5642100462 @default.
- W564210046 hasConcept C105382558 @default.
- W564210046 hasConcept C108225325 @default.
- W564210046 hasConcept C110738630 @default.
- W564210046 hasConcept C121332964 @default.
- W564210046 hasConcept C127413603 @default.
- W564210046 hasConcept C171250308 @default.
- W564210046 hasConcept C175665537 @default.
- W564210046 hasConcept C192562407 @default.
- W564210046 hasConcept C2779227376 @default.
- W564210046 hasConcept C49040817 @default.
- W564210046 hasConcept C544956773 @default.
- W564210046 hasConcept C61696701 @default.
- W564210046 hasConcept C62520636 @default.
- W564210046 hasConcept C66823137 @default.
- W564210046 hasConceptScore W564210046C105382558 @default.
- W564210046 hasConceptScore W564210046C108225325 @default.
- W564210046 hasConceptScore W564210046C110738630 @default.
- W564210046 hasConceptScore W564210046C121332964 @default.
- W564210046 hasConceptScore W564210046C127413603 @default.
- W564210046 hasConceptScore W564210046C171250308 @default.
- W564210046 hasConceptScore W564210046C175665537 @default.
- W564210046 hasConceptScore W564210046C192562407 @default.
- W564210046 hasConceptScore W564210046C2779227376 @default.
- W564210046 hasConceptScore W564210046C49040817 @default.
- W564210046 hasConceptScore W564210046C544956773 @default.
- W564210046 hasConceptScore W564210046C61696701 @default.
- W564210046 hasConceptScore W564210046C62520636 @default.
- W564210046 hasConceptScore W564210046C66823137 @default.
- W564210046 hasLocation W5642100461 @default.
- W564210046 hasLocation W5642100462 @default.
- W564210046 hasOpenAccess W564210046 @default.