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- W565536169 abstract "The International Symposia on Silicon Materials Science and Technology, sponsored by the Electronics Division, has provided a unique historical record of the progress in our understanding of silicon materials over the last 30 years. A common thread throughout the series has been the characterization, annihilation, and, in some cases, the selective utilization of defects to achieve superior integrated circuit (IC) performance, reliability, and yield." @default.
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- W565536169 date "1998-03-01" @default.
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- W565536169 title "Silicon Materials Science and Technology VIII" @default.
- W565536169 doi "https://doi.org/10.1149/2.f10981if" @default.
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