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- W566814051 abstract "Eight different miniaturised flow-through cell configurations with integrated capacitive EIS (electrolyte–insulator–semiconductor) structure s have been fabricated at wafer level. The EIS structures have been prepared by means of Si technique (electron-beam evaporation, thermal dry oxidation) and serve as pH sensors. The channels for the miniaturised flow-through cell have been manufactured in SU-8 technique (spin-coating, exposure, developing, lift-off). The microcells have diameters of 200–2000 m and volumes of 0.3–5l. The sensitive areas in the channels are ranging from 1.6 to 25 mm 2 . For the realisation of a biosensor, the enzyme penicillinase has been immobilised into the channels on the EIS sensor chip. The electrochemical characterisation of the sensor set-up has been performed by capacitance/voltage ( C/V) and constant capacitance (ConCap) mode, respectively. © 2004 Elsevier B.V. All rights reserved." @default.
- W566814051 created "2016-06-24" @default.
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- W566814051 date "2004-01-01" @default.
- W566814051 modified "2023-09-24" @default.
- W566814051 title "Miniaturised flow-through cell with integrated capacitive EIS sensors fabricated at wafer level using Si and SU-8 technologies" @default.
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