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- W566899521 abstract "The approach-contact-deformation-fracture process at a gold nano contact using a micromachined device was successfully observed in a high resolution transmission electron microscope (HRTEM). MEMS opposing tips (a movable tip with a pair of electrostatic actuators and a fixed tip) was inserted into a HRTEM chamber. When the movable tip was approached to the fixed tip within 1 nm, gold nano contact was formed with 1 V bias voltage. The gold nano contact was thinned by retraction and finally fractured. The series of the formation, retraction and fracture were observed in an atomic scale." @default.
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- W566899521 date "2006-01-01" @default.
- W566899521 modified "2023-09-25" @default.
- W566899521 title "HRTEM Observation and Current Measurement of the Approach-Contact-Deformation-Fracture Process at MEMS Nano Contact between MEMS Opposing Tips" @default.
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- W566899521 doi "https://doi.org/10.1541/ieejsmas.126.504" @default.
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