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- W567079586 abstract "The Impact Drive Mechanism (IDM) utilizes impulsive force generated by piezo actuators, electromagnetic effect etc., which has the resolution of several nanometer and unlimited motion range in principle. This mechanism basically consists of only three components: the main body, the actuator, and the inertial weight. This simplicity enables the mechanism to be micro-sized. The mechanism moves in steps as the actuator makes impulsive force. The step size of the motion can be controlled from several nanometers up to several micrometers. Combining multiple actuators and weights, a multiple degree-of-freedom mobile mechanism can be constructed. Its basic characteristics, application examples are described in the paper. In addition to IDMs using piezoelectric actuator, IDM using rapid thermal extension excited by pulse laser is also introduced." @default.
- W567079586 created "2016-06-24" @default.
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- W567079586 date "1999-06-30" @default.
- W567079586 modified "2023-09-26" @default.
- W567079586 title "Micro Impact Drive Mechanism" @default.
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