Matches in SemOpenAlex for { <https://semopenalex.org/work/W56981324> ?p ?o ?g. }
Showing items 1 to 89 of
89
with 100 items per page.
- W56981324 endingPage "310" @default.
- W56981324 startingPage "306" @default.
- W56981324 abstract "An on-wafer measurement technique allowing measurement of a superconducting film's penetration depth without post device-fabrication separation of the chips has been investigated. Coplanar waveguide (CPW) probes and a CPW to microstrip transition are utilized, allowing the use of commercially available LakeShore® CPX-1.5K cryogenic CPW probing station capable of microwave measurements to 50 GHz. The use of CPW probes allows for rapid prototyping and is nondestructive to the device wafers, and hence compatible with many device fabrication technologies. Measurement techniques utilizing resonant microwave circuits have been reported (1),(2), but require mounting to custom-made test fixtures and are not performed on-wafer, but instead on individual diced devices. However, such a dicing requirement is incompatible with our ultra-thin Si, Au beam-lead chip architecture (3). In addition to a traditional resonant circuit measurement technique, a technique that uses on-wafer calibration standards is discussed. The on-wafer calibration eliminates possible effects introduced by the testing setup and potentially offers additional advantages such as a size reduction and a direct measurement of RF loss. The designs and results for both measurement techniques are reported for NbTiN films." @default.
- W56981324 created "2016-06-24" @default.
- W56981324 creator A5004036533 @default.
- W56981324 creator A5014415680 @default.
- W56981324 creator A5071950666 @default.
- W56981324 date "2010-03-01" @default.
- W56981324 modified "2023-09-24" @default.
- W56981324 title "On-Wafer Penetration Depth Measurements of Superconducting Films" @default.
- W56981324 cites W1979865939 @default.
- W56981324 cites W2050627264 @default.
- W56981324 cites W2100890965 @default.
- W56981324 cites W2109905181 @default.
- W56981324 cites W2151031858 @default.
- W56981324 cites W55151886 @default.
- W56981324 hasPublicationYear "2010" @default.
- W56981324 type Work @default.
- W56981324 sameAs 56981324 @default.
- W56981324 citedByCount "0" @default.
- W56981324 crossrefType "journal-article" @default.
- W56981324 hasAuthorship W56981324A5004036533 @default.
- W56981324 hasAuthorship W56981324A5014415680 @default.
- W56981324 hasAuthorship W56981324A5071950666 @default.
- W56981324 hasConcept C105795698 @default.
- W56981324 hasConcept C123657345 @default.
- W56981324 hasConcept C127413603 @default.
- W56981324 hasConcept C136525101 @default.
- W56981324 hasConcept C142724271 @default.
- W56981324 hasConcept C160671074 @default.
- W56981324 hasConcept C165013422 @default.
- W56981324 hasConcept C165838908 @default.
- W56981324 hasConcept C192562407 @default.
- W56981324 hasConcept C204787440 @default.
- W56981324 hasConcept C24326235 @default.
- W56981324 hasConcept C33923547 @default.
- W56981324 hasConcept C3736036 @default.
- W56981324 hasConcept C41008148 @default.
- W56981324 hasConcept C44445679 @default.
- W56981324 hasConcept C44838205 @default.
- W56981324 hasConcept C49040817 @default.
- W56981324 hasConcept C71924100 @default.
- W56981324 hasConcept C76155785 @default.
- W56981324 hasConceptScore W56981324C105795698 @default.
- W56981324 hasConceptScore W56981324C123657345 @default.
- W56981324 hasConceptScore W56981324C127413603 @default.
- W56981324 hasConceptScore W56981324C136525101 @default.
- W56981324 hasConceptScore W56981324C142724271 @default.
- W56981324 hasConceptScore W56981324C160671074 @default.
- W56981324 hasConceptScore W56981324C165013422 @default.
- W56981324 hasConceptScore W56981324C165838908 @default.
- W56981324 hasConceptScore W56981324C192562407 @default.
- W56981324 hasConceptScore W56981324C204787440 @default.
- W56981324 hasConceptScore W56981324C24326235 @default.
- W56981324 hasConceptScore W56981324C33923547 @default.
- W56981324 hasConceptScore W56981324C3736036 @default.
- W56981324 hasConceptScore W56981324C41008148 @default.
- W56981324 hasConceptScore W56981324C44445679 @default.
- W56981324 hasConceptScore W56981324C44838205 @default.
- W56981324 hasConceptScore W56981324C49040817 @default.
- W56981324 hasConceptScore W56981324C71924100 @default.
- W56981324 hasConceptScore W56981324C76155785 @default.
- W56981324 hasLocation W569813241 @default.
- W56981324 hasOpenAccess W56981324 @default.
- W56981324 hasPrimaryLocation W569813241 @default.
- W56981324 hasRelatedWork W1484660290 @default.
- W56981324 hasRelatedWork W1563226446 @default.
- W56981324 hasRelatedWork W1596681098 @default.
- W56981324 hasRelatedWork W1816162060 @default.
- W56981324 hasRelatedWork W1892427341 @default.
- W56981324 hasRelatedWork W1929792059 @default.
- W56981324 hasRelatedWork W2033526105 @default.
- W56981324 hasRelatedWork W2059452671 @default.
- W56981324 hasRelatedWork W2077567523 @default.
- W56981324 hasRelatedWork W2082106534 @default.
- W56981324 hasRelatedWork W2106799265 @default.
- W56981324 hasRelatedWork W2151864953 @default.
- W56981324 hasRelatedWork W2808207746 @default.
- W56981324 hasRelatedWork W2810186450 @default.
- W56981324 hasRelatedWork W2937290082 @default.
- W56981324 hasRelatedWork W3041495794 @default.
- W56981324 hasRelatedWork W3134662293 @default.
- W56981324 hasRelatedWork W762837972 @default.
- W56981324 hasRelatedWork W2297770977 @default.
- W56981324 hasRelatedWork W2488887098 @default.
- W56981324 isParatext "false" @default.
- W56981324 isRetracted "false" @default.
- W56981324 magId "56981324" @default.
- W56981324 workType "article" @default.