Matches in SemOpenAlex for { <https://semopenalex.org/work/W58151637> ?p ?o ?g. }
Showing items 1 to 47 of
47
with 100 items per page.
- W58151637 abstract "The results of investigations of LCVD process in conditions of adsorption's limiting of reagent entry to reaction zone on sample surface are presented. The nonequilibrium process of adsorption is analyzed. The process parameters, determining metal thin films growth rate on nanosecond LCVD, are revealed. The chemical character of adsorption MOS molecules on metal surfaces is confirmed. The comparison of nanosecond LCVD and atomic-layer technology AL CVD shows that equal in quality thin films of chemical compounds may be formed in first case with productivity, which is better by more than 3 orders of magnitude." @default.
- W58151637 created "2016-06-24" @default.
- W58151637 creator A5041266705 @default.
- W58151637 creator A5042057050 @default.
- W58151637 date "2011-01-01" @default.
- W58151637 modified "2023-09-23" @default.
- W58151637 title "Гетерофазный процесс лазерно-пиролитического формирования тонких плёнок в условиях адсорбционного ограничения поступления реагентов" @default.
- W58151637 hasPublicationYear "2011" @default.
- W58151637 type Work @default.
- W58151637 sameAs 58151637 @default.
- W58151637 citedByCount "0" @default.
- W58151637 crossrefType "journal-article" @default.
- W58151637 hasAuthorship W58151637A5041266705 @default.
- W58151637 hasAuthorship W58151637A5042057050 @default.
- W58151637 hasConcept C113196181 @default.
- W58151637 hasConcept C147789679 @default.
- W58151637 hasConcept C150394285 @default.
- W58151637 hasConcept C171250308 @default.
- W58151637 hasConcept C177801218 @default.
- W58151637 hasConcept C178790620 @default.
- W58151637 hasConcept C185592680 @default.
- W58151637 hasConcept C19067145 @default.
- W58151637 hasConcept C192562407 @default.
- W58151637 hasConcept C32909587 @default.
- W58151637 hasConcept C40875361 @default.
- W58151637 hasConcept C544153396 @default.
- W58151637 hasConceptScore W58151637C113196181 @default.
- W58151637 hasConceptScore W58151637C147789679 @default.
- W58151637 hasConceptScore W58151637C150394285 @default.
- W58151637 hasConceptScore W58151637C171250308 @default.
- W58151637 hasConceptScore W58151637C177801218 @default.
- W58151637 hasConceptScore W58151637C178790620 @default.
- W58151637 hasConceptScore W58151637C185592680 @default.
- W58151637 hasConceptScore W58151637C19067145 @default.
- W58151637 hasConceptScore W58151637C192562407 @default.
- W58151637 hasConceptScore W58151637C32909587 @default.
- W58151637 hasConceptScore W58151637C40875361 @default.
- W58151637 hasConceptScore W58151637C544153396 @default.
- W58151637 hasIssue "-2" @default.
- W58151637 hasLocation W581516371 @default.
- W58151637 hasOpenAccess W58151637 @default.
- W58151637 hasPrimaryLocation W581516371 @default.
- W58151637 hasVolume "5" @default.
- W58151637 isParatext "false" @default.
- W58151637 isRetracted "false" @default.
- W58151637 magId "58151637" @default.
- W58151637 workType "article" @default.