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- W585053 abstract "Alan Krauss at Argonne National Laboratory (Argonne, IL) and Albert Schultz at Ionwerks (Houston, TX) are collaborating on the development of three commercially feasible spectroscopic methods. Eventually, their instruments may be used on line to monitor and control thin-film manufacturing processes for the semiconductor industry and other applications. The techniques being developed are ion-scattering spectroscopy (ISS), direct-recoil spectroscopy (DRS), and mass spectroscopy of recoiled ions (MSRI). These methods have been grouped under the general term TOF-SARS for [open quotes]time-of-flight [ion] scattering and recoil spectroscopies[close quotes]. In combination with pulsed ion guns, TOF detectors sensitive to scattered ions and neutrals permit the use of a lower incident beam dose than is required in conventional ISS or DRS, so that the methods can be used for relatively nondestructive thin-film analysis. The TOF-SARS methods are used to determine the elemental composition of a surface based on the exchange of kinetic energy between the primary ions and the surface atoms." @default.
- W585053 created "2016-06-24" @default.
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- W585053 date "1994-04-01" @default.
- W585053 modified "2023-09-26" @default.
- W585053 title "Ion spectroscopies with TOF detection. Changing the atmosphere of thin-film analysis" @default.
- W585053 hasPublicationYear "1994" @default.
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