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- W587185243 abstract "Eight contributions address: GaAs on Si, ion beam synthesis in silicon, ion beam processing of chemical vapor deposited silicon layers, technology and devices for silicon based three-dimensional circuits, integrated fabrication of micromechanical structures on silicon, micromachining of silicon for" @default.
- W587185243 created "2016-06-24" @default.
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- W587185243 date "1991-01-01" @default.
- W587185243 modified "2023-09-24" @default.
- W587185243 title "Novel silicon based technologies : proceedings of the NATO Advanced Study Institute on Novel Sillicon Based Technologies, Boca Raton, Florida, U.S.A., 17-28 July 1989" @default.
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