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- W587900596 abstract "Copper systems equivalent in performance to silver or gold systems. Titanium layer and palladium layer deposited on semiconductor device by electron beam evaporation. Desired pattern etched using photoresist. Thin layer of copper plated on contact pattern from cyanide solution. Copper layer then built up to 4 to 8 microns by electroplatng from acid solution." @default.
- W587900596 created "2016-06-24" @default.
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- W587900596 date "1984-04-01" @default.
- W587900596 modified "2023-09-26" @default.
- W587900596 title "Ti/Pd/Cu Contacts for Semiconductor Devices" @default.
- W587900596 hasPublicationYear "1984" @default.
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