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- W59389426 abstract "We prepared 80 nm-thick TiSix on each 70 nm-thick amorphous silicon and polysilicon substrate using an RF sputtering with target. TiSix composite silicide layers were stabilized by rapid thermal annealing(RTA) of for 20 seconds. Line width of patterns were embodied by photolithography and dry etching process, then each additional annealing process at for 3 hours was executed. We investigated the change of sheet resistance with a four-point probe, and cross sectional microstructure with a field emission scanning electron microscope(FE-SEM) and transmission electron microscope(TEM), respectively. We observe an abrupt change of resistivity and voids at the silicide surface due to interdiffusion of silicide and composite titanium silicide in the amorphous substrates with additional annealing. Our result implies that the electrical resistance of composite titanium silicide may be tunned by employing appropriate substrates and annealing condition." @default.
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- W59389426 date "2006-01-01" @default.
- W59389426 modified "2023-09-24" @default.
- W59389426 title "Property of Composite Titanium Silicides on Amorphous and Crystalline Silicon Substrates" @default.
- W59389426 hasPublicationYear "2006" @default.
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