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- W59451214 abstract "Cornell Center for Materials Research (CCMR), a Materials Research Science and Engineering Center of the National Science Foundation (DMR-0520404)" @default.
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- W59451214 date "2006-09-01" @default.
- W59451214 modified "2023-09-27" @default.
- W59451214 title "Improving fracture properties of MEMS components by surface control" @default.
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