Matches in SemOpenAlex for { <https://semopenalex.org/work/W600912210> ?p ?o ?g. }
Showing items 1 to 93 of
93
with 100 items per page.
- W600912210 abstract "Preface. Acknowledgments. 1: Introduction. 1. Overview Of Sputtering For Technological Applications. 2. Plasma-Surface Interactions. 3. Charging Of Insulating Surfaces. 4. Overview Of The Monograph. 2:Basic Plasma Phenomenon. 1. The Plasma State. 2. Basic Plasma Structure. 3. Collisions. 4. Summary. 3: Plasma Sources Used For Sputter Deposition. 1. Direct Current (DC) Sources. 2. Alternating Current (AC) Sources. 3. Summary. 4: Response Of A Plasma To An Applied Bias. 1. General Considerations And Approximations. 2. Quasi-Static Approximation Of The Sheath. 3. Breakdown Of The Quasi-Static Approximation. 4. Transient Nature Of The Sheath. 5. Summary. 5: Sinusoidal Waveform. 1. Quasi-Static Regime. 2. Transient Sheath Regime. 3. Summary. 6: Pulsed Waveform. 1. Definition Of The Pulse. 2. Quasi-Static Response Of The System To An Applied Pulse. 3. Approximated Predictions Of Energy Spectra. 4. Higher Frequency Response Of The System To The Pulsed Waveform. 5. Comparison Between Sinusoidal And Pulsed Waveforms. 6. Summary. 7: Application Of A Pulsed Waveform To A Target: Pulsed Reactive Sputtering. 1. Introduction. 2. Application Of A Pulse For Arc Suppression (Predictions). 3. Application Of A Pulse To Reactive Sputtering (Practice). 4. Summary. 8: Application Of A Pulsed Waveform To A Substrate: Pulsed Bias Sputtering. 1. Introduction. 2. Considerations For Pulsed Biasing Of The Substrate. 3. Observed Flux Of Charge To A Pulsed Substrate. 4. Application Of A Pulsed Bias To Film Growth. 5. Summary. 9: Conclusions And Future Directions. 1. Conclusions. 2. Future Directions. References. Index." @default.
- W600912210 created "2016-06-24" @default.
- W600912210 creator A5032046237 @default.
- W600912210 creator A5078650236 @default.
- W600912210 date "2011-09-01" @default.
- W600912210 modified "2023-09-26" @default.
- W600912210 title "Pulsed and Pulsed Bias Sputtering: Principles and Applications" @default.
- W600912210 hasPublicationYear "2011" @default.
- W600912210 type Work @default.
- W600912210 sameAs 600912210 @default.
- W600912210 citedByCount "0" @default.
- W600912210 crossrefType "book" @default.
- W600912210 hasAuthorship W600912210A5032046237 @default.
- W600912210 hasAuthorship W600912210A5078650236 @default.
- W600912210 hasConcept C111368507 @default.
- W600912210 hasConcept C111919701 @default.
- W600912210 hasConcept C119599485 @default.
- W600912210 hasConcept C121332964 @default.
- W600912210 hasConcept C127313418 @default.
- W600912210 hasConcept C127413603 @default.
- W600912210 hasConcept C165801399 @default.
- W600912210 hasConcept C171250308 @default.
- W600912210 hasConcept C184779094 @default.
- W600912210 hasConcept C185544564 @default.
- W600912210 hasConcept C19067145 @default.
- W600912210 hasConcept C192562407 @default.
- W600912210 hasConcept C197424946 @default.
- W600912210 hasConcept C20254490 @default.
- W600912210 hasConcept C22423302 @default.
- W600912210 hasConcept C2776620479 @default.
- W600912210 hasConcept C2777289219 @default.
- W600912210 hasConcept C2780167933 @default.
- W600912210 hasConcept C2780799671 @default.
- W600912210 hasConcept C2781083372 @default.
- W600912210 hasConcept C30475298 @default.
- W600912210 hasConcept C41008148 @default.
- W600912210 hasConcept C49040817 @default.
- W600912210 hasConcept C61427134 @default.
- W600912210 hasConcept C82706917 @default.
- W600912210 hasConcept C97039730 @default.
- W600912210 hasConceptScore W600912210C111368507 @default.
- W600912210 hasConceptScore W600912210C111919701 @default.
- W600912210 hasConceptScore W600912210C119599485 @default.
- W600912210 hasConceptScore W600912210C121332964 @default.
- W600912210 hasConceptScore W600912210C127313418 @default.
- W600912210 hasConceptScore W600912210C127413603 @default.
- W600912210 hasConceptScore W600912210C165801399 @default.
- W600912210 hasConceptScore W600912210C171250308 @default.
- W600912210 hasConceptScore W600912210C184779094 @default.
- W600912210 hasConceptScore W600912210C185544564 @default.
- W600912210 hasConceptScore W600912210C19067145 @default.
- W600912210 hasConceptScore W600912210C192562407 @default.
- W600912210 hasConceptScore W600912210C197424946 @default.
- W600912210 hasConceptScore W600912210C20254490 @default.
- W600912210 hasConceptScore W600912210C22423302 @default.
- W600912210 hasConceptScore W600912210C2776620479 @default.
- W600912210 hasConceptScore W600912210C2777289219 @default.
- W600912210 hasConceptScore W600912210C2780167933 @default.
- W600912210 hasConceptScore W600912210C2780799671 @default.
- W600912210 hasConceptScore W600912210C2781083372 @default.
- W600912210 hasConceptScore W600912210C30475298 @default.
- W600912210 hasConceptScore W600912210C41008148 @default.
- W600912210 hasConceptScore W600912210C49040817 @default.
- W600912210 hasConceptScore W600912210C61427134 @default.
- W600912210 hasConceptScore W600912210C82706917 @default.
- W600912210 hasConceptScore W600912210C97039730 @default.
- W600912210 hasLocation W6009122101 @default.
- W600912210 hasOpenAccess W600912210 @default.
- W600912210 hasPrimaryLocation W6009122101 @default.
- W600912210 hasRelatedWork W144737368 @default.
- W600912210 hasRelatedWork W1527894883 @default.
- W600912210 hasRelatedWork W1585811332 @default.
- W600912210 hasRelatedWork W1940496847 @default.
- W600912210 hasRelatedWork W1973305293 @default.
- W600912210 hasRelatedWork W1982903741 @default.
- W600912210 hasRelatedWork W2029098647 @default.
- W600912210 hasRelatedWork W2035814271 @default.
- W600912210 hasRelatedWork W2056882737 @default.
- W600912210 hasRelatedWork W2067831541 @default.
- W600912210 hasRelatedWork W2095271924 @default.
- W600912210 hasRelatedWork W2127773269 @default.
- W600912210 hasRelatedWork W2182436321 @default.
- W600912210 hasRelatedWork W2512524790 @default.
- W600912210 hasRelatedWork W2516559155 @default.
- W600912210 hasRelatedWork W2986290794 @default.
- W600912210 hasRelatedWork W2997896881 @default.
- W600912210 hasRelatedWork W3023793049 @default.
- W600912210 hasRelatedWork W2820864592 @default.
- W600912210 hasRelatedWork W2833194938 @default.
- W600912210 isParatext "false" @default.
- W600912210 isRetracted "false" @default.
- W600912210 magId "600912210" @default.
- W600912210 workType "book" @default.