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- W60212922 abstract "Abstract : A circuit-level methodology for simulating micromachined inertial sensors based on a hierarchical representation of microelectromechanical systems is presented. In the NODAS methodology (NOdal Design of Actuators and Sensors), various surface micromachined suspended microstructures are designed as netlists of general-purpose micromechanical beams, plates, electrostatic gaps, electrostatic comb-drives, joints, and anchors and evaluated using lumped-parameter behavioral models. NODAS provides the user with a one to one correspondence between layout and schematic, and the ability to simultaneously perform circuit level simulation on both the microelectromechanical components and the electronics in the schematic. The on-chip displacements and global position of each micromechanical component are separated in the netlist, enabling application of translation and rotation of the chip while simultaneously providing access to on-chip displacements for position sensing and electrostatic actuation. Each of the components is modeled with an Analog Hardware Description Language. Simulations of static displacements and modal frequencies of a cantilever beam, crab-leg flexure, folded-flexure resonator, capacitive accelerometer, and a vibratory-rate gyroscope are done using an ordinary differential equation solver. Simulation results agree to within 5% of finite-element analysis for displacements with small angles (less than 10 degrees). Simulation of a 16 kHz vibratory-rate gyroscope system with dual transresistance sense amplifiers, a demodulator and a filter illustrates the ability to perform system-level mixed-domain simulation with the NODAS methodology." @default.
- W60212922 created "2016-06-24" @default.
- W60212922 creator A5049044570 @default.
- W60212922 date "1998-05-07" @default.
- W60212922 modified "2023-09-23" @default.
- W60212922 title "Nodal Design of Actuators and Sensors (NODAS)" @default.
- W60212922 cites W1502025033 @default.
- W60212922 cites W1564649994 @default.
- W60212922 cites W1604602548 @default.
- W60212922 cites W2116288835 @default.
- W60212922 cites W2944667390 @default.
- W60212922 hasPublicationYear "1998" @default.
- W60212922 type Work @default.
- W60212922 sameAs 60212922 @default.
- W60212922 citedByCount "14" @default.
- W60212922 countsByYear W602129222013 @default.
- W60212922 crossrefType "journal-article" @default.
- W60212922 hasAuthorship W60212922A5049044570 @default.
- W60212922 hasConcept C119599485 @default.
- W60212922 hasConcept C121332964 @default.
- W60212922 hasConcept C127413603 @default.
- W60212922 hasConcept C146978453 @default.
- W60212922 hasConcept C158488048 @default.
- W60212922 hasConcept C172707124 @default.
- W60212922 hasConcept C192328126 @default.
- W60212922 hasConcept C194257627 @default.
- W60212922 hasConcept C24326235 @default.
- W60212922 hasConcept C24890656 @default.
- W60212922 hasConcept C41008148 @default.
- W60212922 hasConcept C46362747 @default.
- W60212922 hasConceptScore W60212922C119599485 @default.
- W60212922 hasConceptScore W60212922C121332964 @default.
- W60212922 hasConceptScore W60212922C127413603 @default.
- W60212922 hasConceptScore W60212922C146978453 @default.
- W60212922 hasConceptScore W60212922C158488048 @default.
- W60212922 hasConceptScore W60212922C172707124 @default.
- W60212922 hasConceptScore W60212922C192328126 @default.
- W60212922 hasConceptScore W60212922C194257627 @default.
- W60212922 hasConceptScore W60212922C24326235 @default.
- W60212922 hasConceptScore W60212922C24890656 @default.
- W60212922 hasConceptScore W60212922C41008148 @default.
- W60212922 hasConceptScore W60212922C46362747 @default.
- W60212922 hasLocation W602129221 @default.
- W60212922 hasOpenAccess W60212922 @default.
- W60212922 hasPrimaryLocation W602129221 @default.
- W60212922 hasRelatedWork W1496267491 @default.
- W60212922 hasRelatedWork W1501357369 @default.
- W60212922 hasRelatedWork W1502025033 @default.
- W60212922 hasRelatedWork W1658472922 @default.
- W60212922 hasRelatedWork W2000754466 @default.
- W60212922 hasRelatedWork W2002769135 @default.
- W60212922 hasRelatedWork W2012851684 @default.
- W60212922 hasRelatedWork W2062275750 @default.
- W60212922 hasRelatedWork W2069601597 @default.
- W60212922 hasRelatedWork W2128919817 @default.
- W60212922 hasRelatedWork W2157246334 @default.
- W60212922 hasRelatedWork W2373127826 @default.
- W60212922 hasRelatedWork W2384734513 @default.
- W60212922 hasRelatedWork W2770132246 @default.
- W60212922 hasRelatedWork W2774837633 @default.
- W60212922 hasRelatedWork W2802549610 @default.
- W60212922 hasRelatedWork W2806781901 @default.
- W60212922 hasRelatedWork W2854605067 @default.
- W60212922 hasRelatedWork W3085022181 @default.
- W60212922 hasRelatedWork W1500863422 @default.
- W60212922 isParatext "false" @default.
- W60212922 isRetracted "false" @default.
- W60212922 magId "60212922" @default.
- W60212922 workType "article" @default.