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• W603399389 abstract "The dynamic performance of a nanopositioning system depends on its mechanical resonance frequency, damping, the type of controller used, sensor bandwidth, and associated data acquisition hardware. Recently, speed has become a critical issue in many nanopositioning applications, such as video-rate AFM and high-throughput nanomanufacturing." @default.
• W603399389 created "2016-06-24" @default.
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• W603399389 date "2014-01-01" @default.
• W603399389 modified "2023-09-28" @default.
• W603399389 title "Mechanical Design: Flexure-Based Nanopositioners" @default.
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• W603399389 doi "https://doi.org/10.1007/978-3-319-06617-2_4" @default.
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