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- W604880929 abstract "Micro Electro Mechanical Systems (MEMS) such as microsensors and microactuators that use the electrostatic force between electrodes for sensing and actuation, have numerous advantages over other actuation mechanisms due to their ease of operation, simplicity and favourable scaling laws in the micro domain. One of the main considerations while using electrostatic actuations is that the devices must be operated in the safe working range as there exists the phenomenon of pull-in instability which leads to the failure of the system. In the present work, the non linear analysis of electrostatically actuated MEMS structures is carried out to predict the pull-in voltages and frequencies in order to determine the range of operation for the system throughout the life-cycle without damage. An analogy between the electrostatic phenomenon in MEMS structures and the aeroelastic phenomenon in aircraft wing structures has been inferred in this work. Initially, a linear analysis is adopted to understand the phenomenon in both these fields and their instabilities such as pull-in, divergence and flutter have been explained. Different active and passive control methods adopted so far by various researchers to avoid the instabilities in both the cases are presented. New terminologies have been proposed for MEMS based on their similarity with the aeroelastic phenomenon. The feasibility of microfabrication of the electrostatic MEMS structures based on MicraGeM process is presented in this work. The conversion of a continuous cantilever system into an equivalent lumped mass-spring model based on their energy has been formulated and the equivalent stiffness, mass and electrostatic areas are found to perform the nonlinear analysis of the system. The phase portrait techniques are adopted to find the pull-in voltage and the natural frequency of the mass-spring system, and the significance of the conservative energy value on the system behaviour are discussed. Hence a comparison of this nonlinear approach with the linear case has been done and their respective results are discussed. A non-contact optical Laser Doppler Velocimetry (LDV) set-up is used for the dynamic testing of micro cantilevers. Testing procedures along with the safe operating measures have been presented in order to avoid the pull-in condition. The frequency plots have been drawn for different DC and AC voltages based on the spectral analyzer frequency responses. Finally, the comparison of these frequency plots against the voltages from both the experimental testing and the nonlinear theoretical prediction is carried out and the percentage of accuracy of the prediction value has been found" @default.
- W604880929 created "2016-06-24" @default.
- W604880929 creator A5052109900 @default.
- W604880929 date "2006-01-01" @default.
- W604880929 modified "2023-09-27" @default.
- W604880929 title "Nonlinear dynamic analysis of electrostatically actuated MEMS structures" @default.
- W604880929 hasPublicationYear "2006" @default.
- W604880929 type Work @default.
- W604880929 sameAs 604880929 @default.
- W604880929 citedByCount "0" @default.
- W604880929 crossrefType "dissertation" @default.
- W604880929 hasAuthorship W604880929A5052109900 @default.
- W604880929 hasConcept C117185709 @default.
- W604880929 hasConcept C119599485 @default.
- W604880929 hasConcept C121332964 @default.
- W604880929 hasConcept C127413603 @default.
- W604880929 hasConcept C13393347 @default.
- W604880929 hasConcept C141354745 @default.
- W604880929 hasConcept C146978453 @default.
- W604880929 hasConcept C158622935 @default.
- W604880929 hasConcept C165801399 @default.
- W604880929 hasConcept C171250308 @default.
- W604880929 hasConcept C172707124 @default.
- W604880929 hasConcept C192562407 @default.
- W604880929 hasConcept C2777834885 @default.
- W604880929 hasConcept C2779372316 @default.
- W604880929 hasConcept C37977207 @default.
- W604880929 hasConcept C62520636 @default.
- W604880929 hasConcept C66938386 @default.
- W604880929 hasConcept C78519656 @default.
- W604880929 hasConceptScore W604880929C117185709 @default.
- W604880929 hasConceptScore W604880929C119599485 @default.
- W604880929 hasConceptScore W604880929C121332964 @default.
- W604880929 hasConceptScore W604880929C127413603 @default.
- W604880929 hasConceptScore W604880929C13393347 @default.
- W604880929 hasConceptScore W604880929C141354745 @default.
- W604880929 hasConceptScore W604880929C146978453 @default.
- W604880929 hasConceptScore W604880929C158622935 @default.
- W604880929 hasConceptScore W604880929C165801399 @default.
- W604880929 hasConceptScore W604880929C171250308 @default.
- W604880929 hasConceptScore W604880929C172707124 @default.
- W604880929 hasConceptScore W604880929C192562407 @default.
- W604880929 hasConceptScore W604880929C2777834885 @default.
- W604880929 hasConceptScore W604880929C2779372316 @default.
- W604880929 hasConceptScore W604880929C37977207 @default.
- W604880929 hasConceptScore W604880929C62520636 @default.
- W604880929 hasConceptScore W604880929C66938386 @default.
- W604880929 hasConceptScore W604880929C78519656 @default.
- W604880929 hasLocation W6048809291 @default.
- W604880929 hasOpenAccess W604880929 @default.
- W604880929 hasPrimaryLocation W6048809291 @default.
- W604880929 hasRelatedWork W1970667414 @default.
- W604880929 hasRelatedWork W1980681834 @default.
- W604880929 hasRelatedWork W2023247531 @default.
- W604880929 hasRelatedWork W2040173733 @default.
- W604880929 hasRelatedWork W2046105993 @default.
- W604880929 hasRelatedWork W2108273716 @default.
- W604880929 hasRelatedWork W2123796816 @default.
- W604880929 hasRelatedWork W2174862663 @default.
- W604880929 hasRelatedWork W2296478626 @default.
- W604880929 hasRelatedWork W2317052420 @default.
- W604880929 hasRelatedWork W2384993443 @default.
- W604880929 hasRelatedWork W2461106736 @default.
- W604880929 hasRelatedWork W2743230820 @default.
- W604880929 hasRelatedWork W2790891608 @default.
- W604880929 hasRelatedWork W2976588715 @default.
- W604880929 hasRelatedWork W3007390555 @default.
- W604880929 hasRelatedWork W3014906843 @default.
- W604880929 hasRelatedWork W3123033649 @default.
- W604880929 hasRelatedWork W3165276742 @default.
- W604880929 hasRelatedWork W105667689 @default.
- W604880929 isParatext "false" @default.
- W604880929 isRetracted "false" @default.
- W604880929 magId "604880929" @default.
- W604880929 workType "dissertation" @default.