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- W6066234 endingPage "568" @default.
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- W6066234 abstract "This chapter discusses the atomistic film growth and some growth related film properties. Atomistic film growth occurs as a result of the condensation of atoms that are mobile on a surface. The properties of a film of a material formed by any PVD process depends on four factors that affect film growth and properties. Those four factors are: substrate surface condition, details of the deposition process and system geometry, details of film growth on the substrate surface, and post-deposition processing and reactions. In order to have consistent film properties each of these factors must be reproducible. Technological or engineering surfaces are terms that can be applied to the “real” surfaces of engineering materials. These are the surfaces on which films must be formed. Invariably the real surface differs chemically from the bulk material by having surface layers of reacted and adsorbed material, such as oxides and hydrocarbons." @default.
- W6066234 created "2016-06-24" @default.
- W6066234 creator A5036146082 @default.
- W6066234 date "1998-01-01" @default.
- W6066234 modified "2023-10-16" @default.
- W6066234 title "Atomistic Film Growth and Some Growth-Related Film Properties" @default.
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