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• W606810396 abstract "The development of microelectronics silicon technology in the last decade or so, has been characterized by an impressive trend towards higher complexity and enhanced circuit performance. This was made possible by the use of larger chip areas, but also by a continuous drive towards miniaturization, based upon the classical laws of scaling as introduced by Dennard et al. [1]. In these laws, all device dimensions are reduced by a factor λ, and other parameters are adjusted accordingly." @default.
• W606810396 created "2016-06-24" @default.
• W606810396 creator A5020030793 @default.
• W606810396 creator A5049130374 @default.
• W606810396 date "1989-01-01" @default.
• W606810396 modified "2023-10-03" @default.
• W606810396 title "Silicidation by Rapid Thermal Processing" @default.
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• W606810396 doi "https://doi.org/10.1007/978-1-4613-0541-5_2" @default.
• W606810396 hasPublicationYear "1989" @default.
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