Matches in SemOpenAlex for { <https://semopenalex.org/work/W609855554> ?p ?o ?g. }
Showing items 1 to 80 of
80
with 100 items per page.
- W609855554 endingPage "1046" @default.
- W609855554 startingPage "1041" @default.
- W609855554 abstract "This paper deals with an experimental study on ultra-precision diamond cutting of photo resist. A good surface flatness of photo resist is needed to make three-dimensional micro structure by multi-layer LIGA-like process. In this study, an ultra-precision cutting technology is applied to UV lithography process in order to fabricate a flat structure of thick photo resist. The direct cutting of thick photo resist by diamond cutting tool was attempted before and after UV exposure. The surface integrity and the flatness of micro pattern were estimated. In result, the variation of steps was 2μm or less, while it was 130μm or more in the case that the diamond cutting was not applied. The roughness of finished surface by cutting was 0.01μm in arithmetic average roughness Ra." @default.
- W609855554 created "2016-06-24" @default.
- W609855554 creator A5033624492 @default.
- W609855554 creator A5036700937 @default.
- W609855554 creator A5056946407 @default.
- W609855554 creator A5065091370 @default.
- W609855554 creator A5066144274 @default.
- W609855554 creator A5080771084 @default.
- W609855554 date "2005-01-01" @default.
- W609855554 modified "2023-09-25" @default.
- W609855554 title "Surface Integrity of Thick Photo Resist Finished by Ultra-Precision Diamond Cutting(Ultra-precision machining)" @default.
- W609855554 doi "https://doi.org/10.1299/jsmelem.2005.3.1041" @default.
- W609855554 hasPublicationYear "2005" @default.
- W609855554 type Work @default.
- W609855554 sameAs 609855554 @default.
- W609855554 citedByCount "0" @default.
- W609855554 crossrefType "journal-article" @default.
- W609855554 hasAuthorship W609855554A5033624492 @default.
- W609855554 hasAuthorship W609855554A5036700937 @default.
- W609855554 hasAuthorship W609855554A5056946407 @default.
- W609855554 hasAuthorship W609855554A5065091370 @default.
- W609855554 hasAuthorship W609855554A5066144274 @default.
- W609855554 hasAuthorship W609855554A5080771084 @default.
- W609855554 hasConcept C107365816 @default.
- W609855554 hasConcept C120665830 @default.
- W609855554 hasConcept C121332964 @default.
- W609855554 hasConcept C159985019 @default.
- W609855554 hasConcept C191897082 @default.
- W609855554 hasConcept C192562407 @default.
- W609855554 hasConcept C204223013 @default.
- W609855554 hasConcept C26405456 @default.
- W609855554 hasConcept C2776074547 @default.
- W609855554 hasConcept C2776363543 @default.
- W609855554 hasConcept C2776921476 @default.
- W609855554 hasConcept C2778530986 @default.
- W609855554 hasConcept C2779227376 @default.
- W609855554 hasConcept C49040817 @default.
- W609855554 hasConcept C523214423 @default.
- W609855554 hasConcept C53524968 @default.
- W609855554 hasConcept C62520636 @default.
- W609855554 hasConcept C71039073 @default.
- W609855554 hasConceptScore W609855554C107365816 @default.
- W609855554 hasConceptScore W609855554C120665830 @default.
- W609855554 hasConceptScore W609855554C121332964 @default.
- W609855554 hasConceptScore W609855554C159985019 @default.
- W609855554 hasConceptScore W609855554C191897082 @default.
- W609855554 hasConceptScore W609855554C192562407 @default.
- W609855554 hasConceptScore W609855554C204223013 @default.
- W609855554 hasConceptScore W609855554C26405456 @default.
- W609855554 hasConceptScore W609855554C2776074547 @default.
- W609855554 hasConceptScore W609855554C2776363543 @default.
- W609855554 hasConceptScore W609855554C2776921476 @default.
- W609855554 hasConceptScore W609855554C2778530986 @default.
- W609855554 hasConceptScore W609855554C2779227376 @default.
- W609855554 hasConceptScore W609855554C49040817 @default.
- W609855554 hasConceptScore W609855554C523214423 @default.
- W609855554 hasConceptScore W609855554C53524968 @default.
- W609855554 hasConceptScore W609855554C62520636 @default.
- W609855554 hasConceptScore W609855554C71039073 @default.
- W609855554 hasIssue "0" @default.
- W609855554 hasLocation W6098555541 @default.
- W609855554 hasOpenAccess W609855554 @default.
- W609855554 hasPrimaryLocation W6098555541 @default.
- W609855554 hasRelatedWork W1820899084 @default.
- W609855554 hasRelatedWork W2037287570 @default.
- W609855554 hasRelatedWork W2057505333 @default.
- W609855554 hasRelatedWork W2071267218 @default.
- W609855554 hasRelatedWork W2093273369 @default.
- W609855554 hasRelatedWork W2373551507 @default.
- W609855554 hasRelatedWork W3216892313 @default.
- W609855554 hasRelatedWork W4296960743 @default.
- W609855554 hasRelatedWork W4321516590 @default.
- W609855554 hasRelatedWork W574554952 @default.
- W609855554 hasVolume "2005.3" @default.
- W609855554 isParatext "false" @default.
- W609855554 isRetracted "false" @default.
- W609855554 magId "609855554" @default.
- W609855554 workType "article" @default.