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- W61897071 abstract "The handling and characterization of nanoobjects has gained in importance in recent years. The scanning electron microscope (SEM) in combination with a focus ion beam (FIB) is commonly used. These applications often need the positions of involved objects. The position calculation must be precise and able to offer results in real time. This paper introduces a new 3D position detection approach for FIB-SEM dual beam systems. FIB and SEM are combined to a powerful stereo system with accuracy in the lower nm range. The FIB is used with low powers to avoid unintended abrasion. In addition to results and the proof of concept an overview of future challenges is given." @default.
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- W61897071 date "2011-03-24" @default.
- W61897071 modified "2023-09-22" @default.
- W61897071 title "3D position detection with an FIB-SEM dual beam system" @default.
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