Matches in SemOpenAlex for { <https://semopenalex.org/work/W623749651> ?p ?o ?g. }
Showing items 1 to 78 of
78
with 100 items per page.
- W623749651 endingPage "5123" @default.
- W623749651 startingPage "5123" @default.
- W623749651 abstract "In this article we use the Langmuir probe and kinetic model to study the electron energy distribution function (EEDF), the electron temperature, and the electronic density in the radio-frequency inductively coupled plasma of Ar-N2 discharge. It has been found that, with the increase of the N2 flow, the EEDF varies from the bi-temperature distribution to the tri-temperature distribution; the electron temperature drops monotonically at low pressures (pp>1.3 Pa). In addition, due to the recombination of electrons and nitrogen molecular ions, the electron density drops substantially at high pressures when a small amount of N2 is added to the gas mixture. Although the theoretically obtained electron temperature is high than the experimentally measured one, the theoretical model presents good predictions of the influences of N2 ratio in Ar-N2 mixture on the electron temperature and EEDF." @default.
- W623749651 created "2016-06-24" @default.
- W623749651 creator A5038947507 @default.
- W623749651 creator A5043328579 @default.
- W623749651 creator A5065795963 @default.
- W623749651 creator A5075909513 @default.
- W623749651 date "2008-01-01" @default.
- W623749651 modified "2023-09-26" @default.
- W623749651 title "Langmuir probe measurement and theoretical studies on inductively coupled plasma in Ar-N2 discharge" @default.
- W623749651 doi "https://doi.org/10.7498/aps.57.5123" @default.
- W623749651 hasPublicationYear "2008" @default.
- W623749651 type Work @default.
- W623749651 sameAs 623749651 @default.
- W623749651 citedByCount "1" @default.
- W623749651 countsByYear W6237496512017 @default.
- W623749651 crossrefType "journal-article" @default.
- W623749651 hasAuthorship W623749651A5038947507 @default.
- W623749651 hasAuthorship W623749651A5043328579 @default.
- W623749651 hasAuthorship W623749651A5065795963 @default.
- W623749651 hasAuthorship W623749651A5075909513 @default.
- W623749651 hasBestOaLocation W6237496511 @default.
- W623749651 hasConcept C121332964 @default.
- W623749651 hasConcept C125485243 @default.
- W623749651 hasConcept C145148216 @default.
- W623749651 hasConcept C147120987 @default.
- W623749651 hasConcept C176118016 @default.
- W623749651 hasConcept C178790620 @default.
- W623749651 hasConcept C184779094 @default.
- W623749651 hasConcept C185592680 @default.
- W623749651 hasConcept C186603090 @default.
- W623749651 hasConcept C192039680 @default.
- W623749651 hasConcept C192562407 @default.
- W623749651 hasConcept C22175881 @default.
- W623749651 hasConcept C43503373 @default.
- W623749651 hasConcept C537208039 @default.
- W623749651 hasConcept C62520636 @default.
- W623749651 hasConcept C82706917 @default.
- W623749651 hasConcept C95974651 @default.
- W623749651 hasConcept C97355855 @default.
- W623749651 hasConceptScore W623749651C121332964 @default.
- W623749651 hasConceptScore W623749651C125485243 @default.
- W623749651 hasConceptScore W623749651C145148216 @default.
- W623749651 hasConceptScore W623749651C147120987 @default.
- W623749651 hasConceptScore W623749651C176118016 @default.
- W623749651 hasConceptScore W623749651C178790620 @default.
- W623749651 hasConceptScore W623749651C184779094 @default.
- W623749651 hasConceptScore W623749651C185592680 @default.
- W623749651 hasConceptScore W623749651C186603090 @default.
- W623749651 hasConceptScore W623749651C192039680 @default.
- W623749651 hasConceptScore W623749651C192562407 @default.
- W623749651 hasConceptScore W623749651C22175881 @default.
- W623749651 hasConceptScore W623749651C43503373 @default.
- W623749651 hasConceptScore W623749651C537208039 @default.
- W623749651 hasConceptScore W623749651C62520636 @default.
- W623749651 hasConceptScore W623749651C82706917 @default.
- W623749651 hasConceptScore W623749651C95974651 @default.
- W623749651 hasConceptScore W623749651C97355855 @default.
- W623749651 hasIssue "8" @default.
- W623749651 hasLocation W6237496511 @default.
- W623749651 hasOpenAccess W623749651 @default.
- W623749651 hasPrimaryLocation W6237496511 @default.
- W623749651 hasRelatedWork W1601588525 @default.
- W623749651 hasRelatedWork W1619276345 @default.
- W623749651 hasRelatedWork W1973786430 @default.
- W623749651 hasRelatedWork W2055907662 @default.
- W623749651 hasRelatedWork W2069397480 @default.
- W623749651 hasRelatedWork W2088270456 @default.
- W623749651 hasRelatedWork W2631804703 @default.
- W623749651 hasRelatedWork W3162271292 @default.
- W623749651 hasRelatedWork W4367186977 @default.
- W623749651 hasRelatedWork W93119083 @default.
- W623749651 hasVolume "57" @default.
- W623749651 isParatext "false" @default.
- W623749651 isRetracted "false" @default.
- W623749651 magId "623749651" @default.
- W623749651 workType "article" @default.