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- W623798577 abstract "Copper nitride film (Cu(3)N) and La-doped copper nitride films (La(x)Cu(3)N) were prepared on glass substrates by reactive magnetron sputtering of a pure Cu and a pure La targets under N(2) atmosphere. The results show that La-free film was composed Of Cu(3)A crystallites with anti-ReO(3) structure with (111) texture. The formation of the La(x)Cu(3)N films is affected strongly by La, and the peak intensity of the preferred crystalline [111]-orientation decreases with increasing the concentration of La. High concentration of La may prevent the formation of the Cu(3)N from crystallization. Compared with the Cu(3)N films, the resistivity of the La(x)Cu(3)N films have been decreased." @default.
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- W623798577 date "2009-10-10" @default.
- W623798577 modified "2023-10-03" @default.
- W623798577 title "La-doped Copper Nitride Films Prepared by Reactive Magnetron Sputtering" @default.
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