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- W625782591 abstract "List of Figures. List of Tables. Glossary. Foreword. Preface. Acknowledgments. 1. Introduction to Scanning Probe Lithography. 2. SPL by Electric-Field-Enhanced Oxidation. 3. Resist Exposure Using Field-Emitted Electrons. 4. SPL Linewidth Control. 5. Critical Dimension Patterning Using SPL. 6. High Speed Resist Exposure With a Single Tip. 7. On-Chip Lithography Control. 8. Scanning Probe Tips for SPL. 9. Scanning Probe Arrays for Lithography. Epilog. List of Publications. Index." @default.
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- W625782591 date "2016-01-01" @default.
- W625782591 modified "2023-09-27" @default.
- W625782591 title "Scanning-Probe Lithography" @default.
- W625782591 doi "https://doi.org/10.1007/978-94-017-9780-1_102176" @default.
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