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- W62842020 abstract "In the paper the description of design features of the vacuum system «QUANT» intended for ion-magnetron deposition of coatings with nanocrystalline structure is proposed. The technical characteristics of the system, description of deposition methods and investigations results of the structure and mechanical properties of nanocrystalline coatings obtained by the system are given." @default.
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- W62842020 date "2004-01-01" @default.
- W62842020 modified "2023-09-23" @default.
- W62842020 title "Установка ионно-магнетронного напыления нанокристаллических покрытий (квант)" @default.
- W62842020 hasPublicationYear "2004" @default.
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