Matches in SemOpenAlex for { <https://semopenalex.org/work/W636285536> ?p ?o ?g. }
Showing items 1 to 77 of
77
with 100 items per page.
- W636285536 abstract "This book focuses on the creative use of chemistry in the fabrication of a variety of oxide and non-oxide materials which are likely to play a crucial role in the development of the next generation of microelectronics devices. It includes inorganic precursor chemistry, gas-phase and solid-state chemistry, materials science, chemical physics and chemical engineering. Highlights include the deposition of high-k dielectric gate oxides, ferroelectric oxide films for infrared and memory applications, low-k dielectrics, TiN and TaN diffusion barriers, and fresh precursors for III-V nitrides. The emphasis is on chemical methods for the controlled deposition of thin films, for which chemical vapor deposition (CVD) has proven to be a useful and versatile technique. Of particular interest is the use of liquid-injection MOCVD for the deposition of oxide multilayers and superlattices. Solution deposition techniques such as sol-gel, metalorganic decomposition (MOD), hydrothermal processing are also prominently featured. Topics include: CVD of oxide ceramics; CVD of nonoxide ceramics; solution deposition of electronic ceramics; alternative chemical processing methods and characterization of electronic ceramics.." @default.
- W636285536 created "2016-06-24" @default.
- W636285536 creator A5020916055 @default.
- W636285536 date "2000-01-01" @default.
- W636285536 modified "2023-09-23" @default.
- W636285536 title "Chemical processing of dielectrics, insulators and electronic ceramics : symposium held November 29-December 1, 1999, Boston, Massachusetts, U.S.A." @default.
- W636285536 hasPublicationYear "2000" @default.
- W636285536 type Work @default.
- W636285536 sameAs 636285536 @default.
- W636285536 citedByCount "0" @default.
- W636285536 crossrefType "journal-article" @default.
- W636285536 hasAuthorship W636285536A5020916055 @default.
- W636285536 hasConcept C110738630 @default.
- W636285536 hasConcept C133386390 @default.
- W636285536 hasConcept C134132462 @default.
- W636285536 hasConcept C151730666 @default.
- W636285536 hasConcept C171250308 @default.
- W636285536 hasConcept C175665537 @default.
- W636285536 hasConcept C183866003 @default.
- W636285536 hasConcept C187937830 @default.
- W636285536 hasConcept C19067145 @default.
- W636285536 hasConcept C191897082 @default.
- W636285536 hasConcept C192562407 @default.
- W636285536 hasConcept C2779227376 @default.
- W636285536 hasConcept C2779851234 @default.
- W636285536 hasConcept C2816523 @default.
- W636285536 hasConcept C49040817 @default.
- W636285536 hasConcept C57410435 @default.
- W636285536 hasConcept C64297162 @default.
- W636285536 hasConcept C75937256 @default.
- W636285536 hasConcept C86803240 @default.
- W636285536 hasConceptScore W636285536C110738630 @default.
- W636285536 hasConceptScore W636285536C133386390 @default.
- W636285536 hasConceptScore W636285536C134132462 @default.
- W636285536 hasConceptScore W636285536C151730666 @default.
- W636285536 hasConceptScore W636285536C171250308 @default.
- W636285536 hasConceptScore W636285536C175665537 @default.
- W636285536 hasConceptScore W636285536C183866003 @default.
- W636285536 hasConceptScore W636285536C187937830 @default.
- W636285536 hasConceptScore W636285536C19067145 @default.
- W636285536 hasConceptScore W636285536C191897082 @default.
- W636285536 hasConceptScore W636285536C192562407 @default.
- W636285536 hasConceptScore W636285536C2779227376 @default.
- W636285536 hasConceptScore W636285536C2779851234 @default.
- W636285536 hasConceptScore W636285536C2816523 @default.
- W636285536 hasConceptScore W636285536C49040817 @default.
- W636285536 hasConceptScore W636285536C57410435 @default.
- W636285536 hasConceptScore W636285536C64297162 @default.
- W636285536 hasConceptScore W636285536C75937256 @default.
- W636285536 hasConceptScore W636285536C86803240 @default.
- W636285536 hasLocation W6362855361 @default.
- W636285536 hasOpenAccess W636285536 @default.
- W636285536 hasPrimaryLocation W6362855361 @default.
- W636285536 hasRelatedWork W1662767772 @default.
- W636285536 hasRelatedWork W1980287000 @default.
- W636285536 hasRelatedWork W2001126641 @default.
- W636285536 hasRelatedWork W2002962443 @default.
- W636285536 hasRelatedWork W2035438221 @default.
- W636285536 hasRelatedWork W2049657976 @default.
- W636285536 hasRelatedWork W2114491282 @default.
- W636285536 hasRelatedWork W2124681474 @default.
- W636285536 hasRelatedWork W2139349735 @default.
- W636285536 hasRelatedWork W2272811522 @default.
- W636285536 hasRelatedWork W2329869560 @default.
- W636285536 hasRelatedWork W2949531926 @default.
- W636285536 hasRelatedWork W2949544052 @default.
- W636285536 hasRelatedWork W2949570188 @default.
- W636285536 hasRelatedWork W2950495947 @default.
- W636285536 hasRelatedWork W3000117447 @default.
- W636285536 hasRelatedWork W3046061107 @default.
- W636285536 hasRelatedWork W3147857101 @default.
- W636285536 hasRelatedWork W3206952324 @default.
- W636285536 hasRelatedWork W392078064 @default.
- W636285536 isParatext "false" @default.
- W636285536 isRetracted "false" @default.
- W636285536 magId "636285536" @default.
- W636285536 workType "article" @default.