Matches in SemOpenAlex for { <https://semopenalex.org/work/W63628567> ?p ?o ?g. }
- W63628567 endingPage "113" @default.
- W63628567 startingPage "1" @default.
- W63628567 abstract "This chapter discusses that molecular beam epitaxy (MBE) involves the generation of fluxes of constituent matrix and doping species (molecular beam) and their reaction at the substrate to form an ordered over-layer (epitaxy). To maintain the high purity and integrity of the deposit, stringent vacuum conditions are needed. A key attribute of MBE is the precision with which the composition and doping of a structure can be tailored, such that atomically abrupt features can be produced. The evaporation procedure, flux incidence on the substrate, vacuum, and process diagnostics are controlled by a supervisory operator or computer. The MBE process is supplemented by ex situ substrate preparation and wafer introduction procedures. For a better understanding of current MBE methodology and system designs, it is useful to take a brief look at the historical development of the MBE process. Retraction of sources into small volume load-lock chambers that can be isolated from the deposition chamber with a valve permits venting and reloading of the cell without disturbing the deposition environment. The integral control term corrects for offset, a condition where the system temperature stabilizes at a fixed interval below the set point temperature." @default.
- W63628567 created "2016-06-24" @default.
- W63628567 creator A5003912776 @default.
- W63628567 creator A5012099553 @default.
- W63628567 creator A5071651612 @default.
- W63628567 date "1995-01-01" @default.
- W63628567 modified "2023-09-27" @default.
- W63628567 title "The Technology and Design of Molecular Beam Epitaxy Systems" @default.
- W63628567 cites W1589314003 @default.
- W63628567 cites W1965237552 @default.
- W63628567 cites W1965719259 @default.
- W63628567 cites W1966612825 @default.
- W63628567 cites W1968501443 @default.
- W63628567 cites W1969010378 @default.
- W63628567 cites W1969068129 @default.
- W63628567 cites W1970453938 @default.
- W63628567 cites W1972432839 @default.
- W63628567 cites W1973763741 @default.
- W63628567 cites W1975357366 @default.
- W63628567 cites W1975398130 @default.
- W63628567 cites W1975730630 @default.
- W63628567 cites W1975791840 @default.
- W63628567 cites W1977683812 @default.
- W63628567 cites W1977725179 @default.
- W63628567 cites W1978240244 @default.
- W63628567 cites W1978425721 @default.
- W63628567 cites W1980216138 @default.
- W63628567 cites W1980756958 @default.
- W63628567 cites W1983510056 @default.
- W63628567 cites W1987255481 @default.
- W63628567 cites W1988174402 @default.
- W63628567 cites W1988922353 @default.
- W63628567 cites W1990942331 @default.
- W63628567 cites W1993095434 @default.
- W63628567 cites W1993790713 @default.
- W63628567 cites W1993836839 @default.
- W63628567 cites W1995410574 @default.
- W63628567 cites W1996319678 @default.
- W63628567 cites W1997858365 @default.
- W63628567 cites W1999920717 @default.
- W63628567 cites W2001688968 @default.
- W63628567 cites W2004599509 @default.
- W63628567 cites W2004661386 @default.
- W63628567 cites W2005539872 @default.
- W63628567 cites W2005793961 @default.
- W63628567 cites W2006487911 @default.
- W63628567 cites W2007166907 @default.
- W63628567 cites W2008547042 @default.
- W63628567 cites W2009513209 @default.
- W63628567 cites W2010475410 @default.
- W63628567 cites W2011600462 @default.
- W63628567 cites W2012123463 @default.
- W63628567 cites W2013045269 @default.
- W63628567 cites W2014437608 @default.
- W63628567 cites W2015118102 @default.
- W63628567 cites W2016354010 @default.
- W63628567 cites W2017229801 @default.
- W63628567 cites W2023526668 @default.
- W63628567 cites W2025021482 @default.
- W63628567 cites W2025242082 @default.
- W63628567 cites W2025783377 @default.
- W63628567 cites W2025811234 @default.
- W63628567 cites W2026453737 @default.
- W63628567 cites W2027220055 @default.
- W63628567 cites W2027759420 @default.
- W63628567 cites W2029152376 @default.
- W63628567 cites W2029241703 @default.
- W63628567 cites W2031231891 @default.
- W63628567 cites W2031408888 @default.
- W63628567 cites W2033284603 @default.
- W63628567 cites W2034834927 @default.
- W63628567 cites W2037767272 @default.
- W63628567 cites W2038780189 @default.
- W63628567 cites W2043528883 @default.
- W63628567 cites W2044150754 @default.
- W63628567 cites W2044658647 @default.
- W63628567 cites W2044839084 @default.
- W63628567 cites W2045143149 @default.
- W63628567 cites W2045603780 @default.
- W63628567 cites W2045669634 @default.
- W63628567 cites W2046020582 @default.
- W63628567 cites W2046205658 @default.
- W63628567 cites W2046505928 @default.
- W63628567 cites W2049863588 @default.
- W63628567 cites W2051268399 @default.
- W63628567 cites W2052038369 @default.
- W63628567 cites W2052472369 @default.
- W63628567 cites W2052727886 @default.
- W63628567 cites W2053714767 @default.
- W63628567 cites W2055114528 @default.
- W63628567 cites W2055382792 @default.
- W63628567 cites W2058040301 @default.
- W63628567 cites W2061223019 @default.
- W63628567 cites W2062078604 @default.
- W63628567 cites W2064601746 @default.
- W63628567 cites W2066414758 @default.
- W63628567 cites W2066784783 @default.
- W63628567 cites W2067377145 @default.