Matches in SemOpenAlex for { <https://semopenalex.org/work/W6365635> ?p ?o ?g. }
- W6365635 endingPage "181" @default.
- W6365635 startingPage "153" @default.
- W6365635 abstract "In this chapter, we focus on hafnium-based gate dielectrics. HfO2 is regarded as the most promising material for the high–k gate dielectrics owing to its large dielectric constant and large band-gap energy. In the first part of this chapter, these characteristics are addressed in a comparison with SiO2 and other high-k materials. Thermal stability is a major issue for the application of high-k materials to MOSFETs in LSIs. Although HfO2 satisfies this requirement, severer process conditions may cause problems even with this material. Suppression of these issues is also addressed in the second part of this chapter. In order to enhance the characteristics of HfO2, transformation of the monoclinic phase to the tetragonal and the cubic phases with larger dielectric constant has been pursued recently. We mention the issue in the last part of this chapter." @default.
- W6365635 created "2016-06-24" @default.
- W6365635 creator A5049861668 @default.
- W6365635 date "2013-01-01" @default.
- W6365635 modified "2023-09-23" @default.
- W6365635 title "Hafnium-Based Gate Dielectric Materials" @default.
- W6365635 cites W103493881 @default.
- W6365635 cites W1480979850 @default.
- W6365635 cites W1492292496 @default.
- W6365635 cites W1506723986 @default.
- W6365635 cites W1533293891 @default.
- W6365635 cites W1539328025 @default.
- W6365635 cites W1547146810 @default.
- W6365635 cites W1548973125 @default.
- W6365635 cites W1556948540 @default.
- W6365635 cites W1572253984 @default.
- W6365635 cites W1627033314 @default.
- W6365635 cites W1646998796 @default.
- W6365635 cites W1669132134 @default.
- W6365635 cites W1669216561 @default.
- W6365635 cites W19543119 @default.
- W6365635 cites W1967637000 @default.
- W6365635 cites W1968612568 @default.
- W6365635 cites W1970200102 @default.
- W6365635 cites W1971946345 @default.
- W6365635 cites W1974047129 @default.
- W6365635 cites W1976493982 @default.
- W6365635 cites W1976862169 @default.
- W6365635 cites W1977741730 @default.
- W6365635 cites W1978784900 @default.
- W6365635 cites W1978932172 @default.
- W6365635 cites W1980100128 @default.
- W6365635 cites W1980518634 @default.
- W6365635 cites W1981161876 @default.
- W6365635 cites W1982059704 @default.
- W6365635 cites W1982317140 @default.
- W6365635 cites W1984745183 @default.
- W6365635 cites W1986570588 @default.
- W6365635 cites W1991527480 @default.
- W6365635 cites W1991965248 @default.
- W6365635 cites W1993556524 @default.
- W6365635 cites W1995036089 @default.
- W6365635 cites W1995096426 @default.
- W6365635 cites W1995344796 @default.
- W6365635 cites W1995691998 @default.
- W6365635 cites W1997339010 @default.
- W6365635 cites W1997868664 @default.
- W6365635 cites W1998320671 @default.
- W6365635 cites W1998991681 @default.
- W6365635 cites W2003645630 @default.
- W6365635 cites W2008027055 @default.
- W6365635 cites W2012350557 @default.
- W6365635 cites W2012895228 @default.
- W6365635 cites W2015770003 @default.
- W6365635 cites W2016465869 @default.
- W6365635 cites W2018332778 @default.
- W6365635 cites W2018623821 @default.
- W6365635 cites W2019017977 @default.
- W6365635 cites W2022175767 @default.
- W6365635 cites W2024803671 @default.
- W6365635 cites W2028896230 @default.
- W6365635 cites W2033424362 @default.
- W6365635 cites W2034109600 @default.
- W6365635 cites W2041472746 @default.
- W6365635 cites W2041812006 @default.
- W6365635 cites W2042565601 @default.
- W6365635 cites W2046255626 @default.
- W6365635 cites W2046407687 @default.
- W6365635 cites W2046962943 @default.
- W6365635 cites W2050567519 @default.
- W6365635 cites W2051022102 @default.
- W6365635 cites W2051485734 @default.
- W6365635 cites W2053784345 @default.
- W6365635 cites W2055397436 @default.
- W6365635 cites W2057632067 @default.
- W6365635 cites W2058972538 @default.
- W6365635 cites W2060640396 @default.
- W6365635 cites W2062953588 @default.
- W6365635 cites W2063020274 @default.
- W6365635 cites W2063251203 @default.
- W6365635 cites W2067969324 @default.
- W6365635 cites W2067994653 @default.
- W6365635 cites W2068554424 @default.
- W6365635 cites W2069723551 @default.
- W6365635 cites W2070853273 @default.
- W6365635 cites W2070942837 @default.
- W6365635 cites W2075260366 @default.
- W6365635 cites W2076614108 @default.
- W6365635 cites W2078021597 @default.
- W6365635 cites W2079967175 @default.
- W6365635 cites W2080011501 @default.
- W6365635 cites W2080659521 @default.
- W6365635 cites W2081920240 @default.
- W6365635 cites W2082360369 @default.
- W6365635 cites W2082821751 @default.
- W6365635 cites W2082946722 @default.
- W6365635 cites W2087041232 @default.
- W6365635 cites W2089880407 @default.