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• W638456670 abstract "We have demonstrated a 4-mask-level selective niobium anodization process (SNAP) technology for 125 mm wafers. With the exception of the initial Nb-AlOx-Nb trilayer preparation, this process is carried out almost exclusively within a VLSI fabrication area and utilizes existing 1x lithography, Cl-based reactive ion etching, and materials deposition capability developed for Si technology. Our design consists of a personalized wafer layout with a number of 6 × 6 mm diagnostic chips and a wide variety of SQUIDs, magnetometers (as large as 12 × 12 mm), gradiometers (as large as 12 × 24 mm), soliton oscillators, and other Josephson devices at minimum design rules of 2 μm. We have used this process to produce high quality Josephson junctions with the figure of merit Vm > 60 mV for a Josephson critical current density Jc of 500–1000 A/cm2. Resistors were fabricated with 35-nm-thick e-beam evaporated Pt having a sheet resistance of about 4Ω/□. This approach to Josephson fabrication provides a low overhead, fast turn-around process particularly well suited for trilayer development and for production of many physically large, application specific integrated Josephson devices." @default.
• W638456670 created "2016-06-24" @default.
• W638456670 creator A5007738825 @default.
• W638456670 creator A5009354921 @default.
• W638456670 creator A5029352688 @default.
• W638456670 creator A5033679622 @default.
• W638456670 creator A5036006159 @default.
• W638456670 creator A5044532211 @default.
• W638456670 creator A5078781763 @default.
• W638456670 creator A5081844808 @default.
• W638456670 date "1992-01-01" @default.
• W638456670 modified "2023-09-25" @default.
• W638456670 title "Nb-AlOx-Nb SNAP Technology for 125 mm Wafers Developed in Partnership with Silicon Technology" @default.
• W638456670 cites W1981344361 @default.
• W638456670 cites W1990385034 @default.
• W638456670 cites W2032616091 @default.
• W638456670 cites W2053813953 @default.
• W638456670 cites W2090544587 @default.
• W638456670 doi "https://doi.org/10.1007/978-3-642-77457-7_47" @default.
• W638456670 hasPublicationYear "1992" @default.
• W638456670 type Work @default.
• W638456670 sameAs 638456670 @default.
• W638456670 citedByCount "2" @default.
• W638456670 crossrefType "book-chapter" @default.
• W638456670 hasAuthorship W638456670A5007738825 @default.
• W638456670 hasAuthorship W638456670A5009354921 @default.
• W638456670 hasAuthorship W638456670A5029352688 @default.
• W638456670 hasAuthorship W638456670A5033679622 @default.
• W638456670 hasAuthorship W638456670A5036006159 @default.
• W638456670 hasAuthorship W638456670A5044532211 @default.
• W638456670 hasAuthorship W638456670A5078781763 @default.
• W638456670 hasAuthorship W638456670A5081844808 @default.
• W638456670 hasConcept C100460472 @default.
• W638456670 hasConcept C105487726 @default.
• W638456670 hasConcept C119599485 @default.
• W638456670 hasConcept C12038964 @default.
• W638456670 hasConcept C121332964 @default.
• W638456670 hasConcept C127413603 @default.
• W638456670 hasConcept C136525101 @default.
• W638456670 hasConcept C137488568 @default.
• W638456670 hasConcept C142724271 @default.
• W638456670 hasConcept C160671074 @default.
• W638456670 hasConcept C165801399 @default.
• W638456670 hasConcept C171250308 @default.
• W638456670 hasConcept C191897082 @default.
• W638456670 hasConcept C192562407 @default.
• W638456670 hasConcept C204223013 @default.
• W638456670 hasConcept C204787440 @default.
• W638456670 hasConcept C2779227376 @default.
• W638456670 hasConcept C49040817 @default.
• W638456670 hasConcept C507968137 @default.
• W638456670 hasConcept C54101563 @default.
• W638456670 hasConcept C62520636 @default.
• W638456670 hasConcept C71924100 @default.
• W638456670 hasConceptScore W638456670C100460472 @default.
• W638456670 hasConceptScore W638456670C105487726 @default.
• W638456670 hasConceptScore W638456670C119599485 @default.
• W638456670 hasConceptScore W638456670C12038964 @default.
• W638456670 hasConceptScore W638456670C121332964 @default.
• W638456670 hasConceptScore W638456670C127413603 @default.
• W638456670 hasConceptScore W638456670C136525101 @default.
• W638456670 hasConceptScore W638456670C137488568 @default.
• W638456670 hasConceptScore W638456670C142724271 @default.
• W638456670 hasConceptScore W638456670C160671074 @default.
• W638456670 hasConceptScore W638456670C165801399 @default.
• W638456670 hasConceptScore W638456670C171250308 @default.
• W638456670 hasConceptScore W638456670C191897082 @default.
• W638456670 hasConceptScore W638456670C192562407 @default.
• W638456670 hasConceptScore W638456670C204223013 @default.
• W638456670 hasConceptScore W638456670C204787440 @default.
• W638456670 hasConceptScore W638456670C2779227376 @default.
• W638456670 hasConceptScore W638456670C49040817 @default.
• W638456670 hasConceptScore W638456670C507968137 @default.
• W638456670 hasConceptScore W638456670C54101563 @default.
• W638456670 hasConceptScore W638456670C62520636 @default.
• W638456670 hasConceptScore W638456670C71924100 @default.
• W638456670 hasLocation W6384566701 @default.
• W638456670 hasOpenAccess W638456670 @default.
• W638456670 hasPrimaryLocation W6384566701 @default.
• W638456670 hasRelatedWork W1981809770 @default.
• W638456670 hasRelatedWork W1990479210 @default.
• W638456670 hasRelatedWork W1990608398 @default.
• W638456670 hasRelatedWork W1993903311 @default.
• W638456670 hasRelatedWork W2007705826 @default.
• W638456670 hasRelatedWork W2048990408 @default.
• W638456670 hasRelatedWork W2069170339 @default.
• W638456670 hasRelatedWork W2071896788 @default.
• W638456670 hasRelatedWork W2080863434 @default.
• W638456670 hasRelatedWork W2112682651 @default.
• W638456670 hasRelatedWork W2141305080 @default.
• W638456670 hasRelatedWork W2161174042 @default.
• W638456670 hasRelatedWork W2410714390 @default.
• W638456670 hasRelatedWork W2600078569 @default.
• W638456670 hasRelatedWork W3099633194 @default.
• W638456670 hasRelatedWork W3136460649 @default.
• W638456670 hasRelatedWork W832375880 @default.
• W638456670 hasRelatedWork W2159712400 @default.
• W638456670 hasRelatedWork W2182542711 @default.
• W638456670 hasRelatedWork W2188072928 @default.
• W638456670 isParatext "false" @default.

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