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- W638511118 abstract "A simple method for the analysis of concentration ratios N/Si and O/Si in SiNx/Si and SiOx/Si is presented. 1.95 MeV H beam elastic backscattering was used to determine the composition and thickness. A comparison with 2.1 MeV He beam Rutherford backscsttering (RBS) is given. It provides a complementary analysis technique. A brief discussion on results is given." @default.
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- W638511118 date "1992-01-01" @default.
- W638511118 modified "2023-09-24" @default.
- W638511118 title "MeV PROTON ELASTIC BACKSCATTERING ANALYSIS OF SiNx/Si AND SiOx/Si FILMS" @default.
- W638511118 doi "https://doi.org/10.7498/aps.41.2049" @default.
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