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- W64051388 abstract "Electron Microscopes (EMs) are able to take images from the inside of materials with atomic resolution and thus, are widely used in material science, biomedical and nanotechnology research. (S)TEMs, unlike optical microscopes, can reveal the internal structure of materials at higher magnifications, i.e. on nano scale, since an electron wave has smaller wavelength compared to a photon wave. The electromagnetic objective lens is one of the most important components of the (S)TEM optical system and its properties determine the quality of the acquired images. An objective lens can cause so-called ‘optical aberrations’ which are undesirable. To correct these aberrations, so-called aberration correctors can be developed. The correction of these aberrations of which the defocus and two-fold astigmatism are two main aberrations of (S)TEM objective lens, is essential, since defocus can cause image blurring and two-fold astigmatism can reshape an image. Unfortunately, the current aberration correction procedure takes relatively too much time which is undesirable. The time dependency, accuracy and reproducibility are crucial aspects and should be taken into account in order to obtain a high quality operation. Hence, it is essential to develop a defocus and two-fold astigmatism corrector from the systems and control perspective, by means of closed-loop control on the basis of defocus and two-fold astigmatism measurements. To apply closed-loop control, a sensor capable of measuring aberrations from (S)TEM images, is needed. This necessitates, essentially, a careful survey of different available defocus and two-fold astigmatism measurement methods, using (S)TEM images, to be able to define their restrictions and, finally, to find a suitable measurement method. Also, an implementation of the selected method, in Matlab, is required in order to be able to study the behaviour of the defocus and two-fold astigmatism sensor. These topics will be discussed and the results will be presented." @default.
- W64051388 created "2016-06-24" @default.
- W64051388 creator A5004011471 @default.
- W64051388 date "2012-01-09" @default.
- W64051388 modified "2023-09-27" @default.
- W64051388 title "Analysis and Implementation of an Optical Aberrations Sensor for the Closed-loop Control of (S)TEM Microscopes" @default.
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