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- W64609202 abstract "SiC etch rates and etch selectivity to GaN have been studied under a range of RF plasma power conditions. Slightly higher etch rate and higher etch selectivity were obtained at increased coil RF power. Higher etch rate was also obtained at increased platen RF power, but at the sacrifice of decreasing etch selectivity. Substantial pillar formation was observed when coil RF power is below certain limit. Pillar formation during SiC etches due to variation of process conditions was also studied with methods to reduce pillar formation discussed. We observed that by properly modifying pre-etch clean and etch processes, systematic pillar formation can be avoided." @default.
- W64609202 created "2016-06-24" @default.
- W64609202 creator A5038553565 @default.
- W64609202 creator A5051968022 @default.
- W64609202 creator A5060263700 @default.
- W64609202 creator A5086417451 @default.
- W64609202 creator A5090620792 @default.
- W64609202 date "2009-01-01" @default.
- W64609202 modified "2023-09-26" @default.
- W64609202 title "SiC Substrate Via Etch Process Optimization" @default.
- W64609202 cites W1967947237 @default.
- W64609202 cites W1998912950 @default.
- W64609202 cites W2016278952 @default.
- W64609202 cites W2043948647 @default.
- W64609202 cites W2055128875 @default.
- W64609202 cites W2068803282 @default.
- W64609202 cites W2112561141 @default.
- W64609202 hasPublicationYear "2009" @default.
- W64609202 type Work @default.
- W64609202 sameAs 64609202 @default.
- W64609202 citedByCount "0" @default.
- W64609202 crossrefType "journal-article" @default.
- W64609202 hasAuthorship W64609202A5038553565 @default.
- W64609202 hasAuthorship W64609202A5051968022 @default.
- W64609202 hasAuthorship W64609202A5060263700 @default.
- W64609202 hasAuthorship W64609202A5086417451 @default.
- W64609202 hasAuthorship W64609202A5090620792 @default.
- W64609202 hasConcept C100460472 @default.
- W64609202 hasConcept C105289051 @default.
- W64609202 hasConcept C111368507 @default.
- W64609202 hasConcept C118792377 @default.
- W64609202 hasConcept C127313418 @default.
- W64609202 hasConcept C127413603 @default.
- W64609202 hasConcept C159985019 @default.
- W64609202 hasConcept C161790260 @default.
- W64609202 hasConcept C185592680 @default.
- W64609202 hasConcept C192562407 @default.
- W64609202 hasConcept C194257627 @default.
- W64609202 hasConcept C196054291 @default.
- W64609202 hasConcept C2777289219 @default.
- W64609202 hasConcept C2779227376 @default.
- W64609202 hasConcept C46362747 @default.
- W64609202 hasConcept C49040817 @default.
- W64609202 hasConcept C55493867 @default.
- W64609202 hasConcept C66938386 @default.
- W64609202 hasConcept C81626474 @default.
- W64609202 hasConceptScore W64609202C100460472 @default.
- W64609202 hasConceptScore W64609202C105289051 @default.
- W64609202 hasConceptScore W64609202C111368507 @default.
- W64609202 hasConceptScore W64609202C118792377 @default.
- W64609202 hasConceptScore W64609202C127313418 @default.
- W64609202 hasConceptScore W64609202C127413603 @default.
- W64609202 hasConceptScore W64609202C159985019 @default.
- W64609202 hasConceptScore W64609202C161790260 @default.
- W64609202 hasConceptScore W64609202C185592680 @default.
- W64609202 hasConceptScore W64609202C192562407 @default.
- W64609202 hasConceptScore W64609202C194257627 @default.
- W64609202 hasConceptScore W64609202C196054291 @default.
- W64609202 hasConceptScore W64609202C2777289219 @default.
- W64609202 hasConceptScore W64609202C2779227376 @default.
- W64609202 hasConceptScore W64609202C46362747 @default.
- W64609202 hasConceptScore W64609202C49040817 @default.
- W64609202 hasConceptScore W64609202C55493867 @default.
- W64609202 hasConceptScore W64609202C66938386 @default.
- W64609202 hasConceptScore W64609202C81626474 @default.
- W64609202 hasLocation W646092021 @default.
- W64609202 hasOpenAccess W64609202 @default.
- W64609202 hasPrimaryLocation W646092021 @default.
- W64609202 hasRelatedWork W1875176001 @default.
- W64609202 hasRelatedWork W1978143528 @default.
- W64609202 hasRelatedWork W1980010908 @default.
- W64609202 hasRelatedWork W1986868360 @default.
- W64609202 hasRelatedWork W2006861530 @default.
- W64609202 hasRelatedWork W2009957030 @default.
- W64609202 hasRelatedWork W2021696663 @default.
- W64609202 hasRelatedWork W2024926964 @default.
- W64609202 hasRelatedWork W2028685026 @default.
- W64609202 hasRelatedWork W2034205279 @default.
- W64609202 hasRelatedWork W2044173093 @default.
- W64609202 hasRelatedWork W2055993378 @default.
- W64609202 hasRelatedWork W2094857006 @default.
- W64609202 hasRelatedWork W2302486878 @default.
- W64609202 hasRelatedWork W2326179568 @default.
- W64609202 hasRelatedWork W2586766492 @default.
- W64609202 hasRelatedWork W930678571 @default.
- W64609202 hasRelatedWork W1498304166 @default.
- W64609202 hasRelatedWork W2296589054 @default.
- W64609202 hasRelatedWork W2555313645 @default.
- W64609202 isParatext "false" @default.
- W64609202 isRetracted "false" @default.
- W64609202 magId "64609202" @default.
- W64609202 workType "article" @default.