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- W64648229 abstract "Dry and wet (pyrogenic steam)-grown thermal oxides on (100) silicon were made for an investigation of the radiation sensitivity of MOS devices. Oxides were grown under conditions known to produce state-of-the-art hardened oxides as well as very soft oxides. MOS capacitors were fabricated with thin semi-transparent and thick aluminum gates for irradiation with 10.2-eV vacuum ultraviolet (VUV) photons and 1-MeV electrons, respectively. Electrical measurements were made on MOS capacitors to determine trapped-charge density, charge transport, and thermal-trap depth, using high frequency and quasi-static CV, triangular voltage sweep (TVS), and thermally stimulated current (TSC) techniques. TSC measurements taken on irradiated capacitors to characterize the thermal-energy trap spectra gave varied results. Analytical measurements of interface stoichiometry and impurity profiles were done by the use of ion-scattering spectroscopy (ISS), x-ray photoelectron spectroscopy (XPS), and secondary-ion mass spectroscopy (SIMS)." @default.
- W64648229 created "2016-06-24" @default.
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- W64648229 date "1981-11-01" @default.
- W64648229 modified "2023-09-27" @default.
- W64648229 title "Effects of radiation on oxide materials. Final report 26 Sep 77-25 Sep 78" @default.
- W64648229 hasPublicationYear "1981" @default.
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