Matches in SemOpenAlex for { <https://semopenalex.org/work/W651778534> ?p ?o ?g. }
- W651778534 endingPage "884" @default.
- W651778534 startingPage "879" @default.
- W651778534 abstract "Abstract Using an environment-controlled atomic force microscope, the nanowear of silicon against SiO2 microsphere was investigated under various relative humidity (RH) and ethanol partial pressure (Pa/Psat) conditions. When RH was below 10%, there was no discernable wear of the substrate in any Pa/Psat conditions. However, when RH>10%, although the contact pressure (1.3 GPa) was far less than the yield stress of silicon material (7 GPa), the occurrence of tribochemical wear was observed on silicon surface without ethanol adsorption. When ethanol vapor was introduced, the wear of silicon was inhibited fully or partially depending on RH. At RH below 50%, there was a critical ethanol partial pressure above which tribochemical reaction was completely suppressed and no wear was generated on silicon surface. At RH above 50%, the wear of silicon could be significantly reduced, but not completely, with the increase of ethanol partial pressure. Upon addition of ethanol vapor, the frictional energy dissipation decreased and the energy barrier for tribochemical reaction could also become larger. These factors could explain the lubrication effect of the adsorbate ethanol layer in humid environment. The RH and ethanol partial pressure conditions for the lubrication of Si/SiO2 sliding pairs were identified, which can be used for optimizing the MEMS operation conditions without failure due to wear." @default.
- W651778534 created "2016-06-24" @default.
- W651778534 creator A5040243859 @default.
- W651778534 creator A5052541396 @default.
- W651778534 creator A5059218367 @default.
- W651778534 creator A5062148503 @default.
- W651778534 creator A5075000201 @default.
- W651778534 date "2015-05-01" @default.
- W651778534 modified "2023-10-16" @default.
- W651778534 title "Effect of coadsorption of water and alcohol vapor on the nanowear of silicon" @default.
- W651778534 cites W174128380 @default.
- W651778534 cites W1965258086 @default.
- W651778534 cites W1969578535 @default.
- W651778534 cites W1983279622 @default.
- W651778534 cites W1984987481 @default.
- W651778534 cites W1995779240 @default.
- W651778534 cites W1998383050 @default.
- W651778534 cites W2000817295 @default.
- W651778534 cites W2002547616 @default.
- W651778534 cites W2004469544 @default.
- W651778534 cites W2011450733 @default.
- W651778534 cites W2012094063 @default.
- W651778534 cites W2013354513 @default.
- W651778534 cites W2016735628 @default.
- W651778534 cites W2018399372 @default.
- W651778534 cites W2019714484 @default.
- W651778534 cites W2023543755 @default.
- W651778534 cites W2023898824 @default.
- W651778534 cites W2025691235 @default.
- W651778534 cites W2027345373 @default.
- W651778534 cites W2028653557 @default.
- W651778534 cites W2031105817 @default.
- W651778534 cites W2041460570 @default.
- W651778534 cites W2046353827 @default.
- W651778534 cites W2049918017 @default.
- W651778534 cites W2064344048 @default.
- W651778534 cites W2065954798 @default.
- W651778534 cites W2067835701 @default.
- W651778534 cites W2075230896 @default.
- W651778534 cites W2076355240 @default.
- W651778534 cites W2095308853 @default.
- W651778534 cites W2099456491 @default.
- W651778534 cites W2113012631 @default.
- W651778534 cites W2123125078 @default.
- W651778534 cites W2137178805 @default.
- W651778534 cites W2138781334 @default.
- W651778534 cites W2317697882 @default.
- W651778534 cites W2320774737 @default.
- W651778534 cites W2326610015 @default.
- W651778534 cites W2326675608 @default.
- W651778534 cites W2333502320 @default.
- W651778534 cites W4254531944 @default.
- W651778534 doi "https://doi.org/10.1016/j.wear.2015.02.052" @default.
- W651778534 hasPublicationYear "2015" @default.
- W651778534 type Work @default.
- W651778534 sameAs 651778534 @default.
- W651778534 citedByCount "24" @default.
- W651778534 countsByYear W6517785342016 @default.
- W651778534 countsByYear W6517785342017 @default.
- W651778534 countsByYear W6517785342018 @default.
- W651778534 countsByYear W6517785342019 @default.
- W651778534 countsByYear W6517785342020 @default.
- W651778534 countsByYear W6517785342021 @default.
- W651778534 countsByYear W6517785342022 @default.
- W651778534 crossrefType "journal-article" @default.
- W651778534 hasAuthorship W651778534A5040243859 @default.
- W651778534 hasAuthorship W651778534A5052541396 @default.
- W651778534 hasAuthorship W651778534A5059218367 @default.
- W651778534 hasAuthorship W651778534A5062148503 @default.
- W651778534 hasAuthorship W651778534A5075000201 @default.
- W651778534 hasConcept C127413603 @default.
- W651778534 hasConcept C147534773 @default.
- W651778534 hasConcept C171250308 @default.
- W651778534 hasConcept C178790620 @default.
- W651778534 hasConcept C185592680 @default.
- W651778534 hasConcept C192562407 @default.
- W651778534 hasConcept C2781066024 @default.
- W651778534 hasConcept C49040817 @default.
- W651778534 hasConcept C544956773 @default.
- W651778534 hasConcept C61696701 @default.
- W651778534 hasConceptScore W651778534C127413603 @default.
- W651778534 hasConceptScore W651778534C147534773 @default.
- W651778534 hasConceptScore W651778534C171250308 @default.
- W651778534 hasConceptScore W651778534C178790620 @default.
- W651778534 hasConceptScore W651778534C185592680 @default.
- W651778534 hasConceptScore W651778534C192562407 @default.
- W651778534 hasConceptScore W651778534C2781066024 @default.
- W651778534 hasConceptScore W651778534C49040817 @default.
- W651778534 hasConceptScore W651778534C544956773 @default.
- W651778534 hasConceptScore W651778534C61696701 @default.
- W651778534 hasFunder F4320321001 @default.
- W651778534 hasLocation W6517785341 @default.
- W651778534 hasOpenAccess W651778534 @default.
- W651778534 hasPrimaryLocation W6517785341 @default.
- W651778534 hasRelatedWork W1966612346 @default.
- W651778534 hasRelatedWork W2119454944 @default.
- W651778534 hasRelatedWork W2185121890 @default.
- W651778534 hasRelatedWork W2312552982 @default.