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- W653572076 abstract "Technology. Y.S. Liu, Sources, Optics, and Laser Microfabrication Systems for Direct Writing and Projection Lithography. Fundamentals. T.J. Chuang, Laser-Stimulated Molecular Processes on Surfaces. M. Rothschild, Spectroscopy and Photochemistry of Gases, Adsorbates, and Liquids. C.I.H. Ashby and J.Y. Tsao, Photophysics and Thermophysics of Light Absorption and Energy Transport in Solids. H.J. Zeiger, D.J. Ehrlich, and J.Y. Tsao, Transport and Kinetics. Reactions. J.J. Ritsko, Laser Etching. R.L. Jackson, T.H. Baum, T.T. Kodas, D.J. Ehrlich, and P.B. Comita, Laser Deposition: Energetics and Chemical Kinetics. J. Haigh and M.R. Aylett, Laser Deposition: Experimental Approaches. S.J.C. Irvine, Epitaxy. I.W. Boyd, Doping and Oxidation. Index." @default.
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- W653572076 date "1989-01-01" @default.
- W653572076 modified "2023-10-12" @default.
- W653572076 title "Laser microfabrication : thin film processes and lithography" @default.
- W653572076 hasPublicationYear "1989" @default.
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