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• W656009738 abstract "The Atomic Force Microscope (AFM) is an instrument used for studying the topography of samples with nanometer resolution. Possible samples include specific materials or biological samples. The AFM is a mechanical microscope, since a three dimensional topography image is constructed by raster scanning a sharp tip and a sample surface in close proximity to each other and monitoring tip-sample interactions. The tip-sample interaction is controlled in all three dimensions by means of a piezoelectrical scanning unit which consists of a vertical positioner and a lateral positioner. The vertical positioner is controlled via a feedback operation to control the tip-sample distance. The topography image is based on the control signal being sent to the vertical positioner to move it up or down. The vertical positioner consists of a piezo actuator which suffers from nonlinear behavior due to hysteresis and creep. Due to the nonlinearities, the ratio between the control signal and the resulting vertical displacement is not constant over the full positioning range of the piezo actuator. In current dynamic modes of AFM a large part of the piezo positioning range is used. Therefore, a more direct method to obtain the displacement of the vertical positioner is desired which enables a more accurate estimate for the sample topography. To this end, in this thesis a displacement sensor is added to the vertical positioner of the AFM. The resulting displacement sensor yields a variation in measured step height in the order of 6%, compared to 35% for the conventional control signal when imaging a calibration sample. The lateral positioner is controlled via a feedback operation to maintain high positional accuracy in spite of unknown disturbances and model uncertainty. In this feedback operation, the dynamics of the lateral positioner limit the speed of the AFM. Therefore, for the lateral positioner modern control methods can be used to improve the speed of the AFM. The simulation results for the lateral positioner show that with the use of model based control and H-infinity control the scanning speed can be increased with a factor of 5 when compared to the standard PI controlled system. At the same time the control error for the model based controlled system and the H-infinity controlled system becomes smaller with a factor of 4 and 8, respectively. The bandwidth for the PI controlled system is only 50 [Hz], which is much smaller than the bandwidth for the model based controlled system (1900 [Hz]) and the H1 controlled system (3000 [Hz]). This means a bandwidth improvement with a factor of 38 and 60, respectively. However, further experiments must be carried out to validate the simulation results." @default.
• W656009738 created "2016-06-24" @default.
• W656009738 creator A5052294151 @default.
• W656009738 date "2010-10-27" @default.
• W656009738 modified "2023-09-23" @default.
• W656009738 title "Characterization and Control of an Atomic Force Microscope" @default.
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