Matches in SemOpenAlex for { <https://semopenalex.org/work/W65712875> ?p ?o ?g. }
- W65712875 endingPage "34" @default.
- W65712875 startingPage "29" @default.
- W65712875 abstract "A dc cylindrical magnetron sputtering device is des igned and its characteristics are studied. The device consists of two copper cylinder s with 1.5 and 5 cm in radius and 20 cm in length. A magnetic coil mounted around the outer cylinder generates an axial magnetic field up to 550 G. The effect of different magnetic field on the ionization rate of the discharge is observed. It is shown that the ele ctrical behavior of the discharge strongly depends on the values of the magnetic fiel d and shows an optimum value at which the power absorbed by the plasma is maximum. The effect of different pressure on the ionization rate is also studied and the results are reported." @default.
- W65712875 created "2016-06-24" @default.
- W65712875 creator A5007262446 @default.
- W65712875 creator A5014681499 @default.
- W65712875 creator A5063655667 @default.
- W65712875 creator A5066211761 @default.
- W65712875 creator A5074171459 @default.
- W65712875 creator A5080011265 @default.
- W65712875 date "2009-01-01" @default.
- W65712875 modified "2023-09-26" @default.
- W65712875 title "Design and Fabrication of a DC Cylindrical Magnetron Sputtering Device" @default.
- W65712875 hasPublicationYear "2009" @default.
- W65712875 type Work @default.
- W65712875 sameAs 65712875 @default.
- W65712875 citedByCount "0" @default.
- W65712875 crossrefType "journal-article" @default.
- W65712875 hasAuthorship W65712875A5007262446 @default.
- W65712875 hasAuthorship W65712875A5014681499 @default.
- W65712875 hasAuthorship W65712875A5063655667 @default.
- W65712875 hasAuthorship W65712875A5066211761 @default.
- W65712875 hasAuthorship W65712875A5074171459 @default.
- W65712875 hasAuthorship W65712875A5080011265 @default.
- W65712875 hasConcept C113196181 @default.
- W65712875 hasConcept C115260700 @default.
- W65712875 hasConcept C119599485 @default.
- W65712875 hasConcept C121332964 @default.
- W65712875 hasConcept C123408415 @default.
- W65712875 hasConcept C127413603 @default.
- W65712875 hasConcept C136525101 @default.
- W65712875 hasConcept C142724271 @default.
- W65712875 hasConcept C145148216 @default.
- W65712875 hasConcept C171250308 @default.
- W65712875 hasConcept C178635117 @default.
- W65712875 hasConcept C178790620 @default.
- W65712875 hasConcept C184779094 @default.
- W65712875 hasConcept C185592680 @default.
- W65712875 hasConcept C19067145 @default.
- W65712875 hasConcept C191897082 @default.
- W65712875 hasConcept C192562407 @default.
- W65712875 hasConcept C198291218 @default.
- W65712875 hasConcept C203311528 @default.
- W65712875 hasConcept C204787440 @default.
- W65712875 hasConcept C22423302 @default.
- W65712875 hasConcept C30403606 @default.
- W65712875 hasConcept C38652104 @default.
- W65712875 hasConcept C41008148 @default.
- W65712875 hasConcept C43617362 @default.
- W65712875 hasConcept C544778455 @default.
- W65712875 hasConcept C61427134 @default.
- W65712875 hasConcept C62520636 @default.
- W65712875 hasConcept C71924100 @default.
- W65712875 hasConcept C78519656 @default.
- W65712875 hasConcept C82706917 @default.
- W65712875 hasConceptScore W65712875C113196181 @default.
- W65712875 hasConceptScore W65712875C115260700 @default.
- W65712875 hasConceptScore W65712875C119599485 @default.
- W65712875 hasConceptScore W65712875C121332964 @default.
- W65712875 hasConceptScore W65712875C123408415 @default.
- W65712875 hasConceptScore W65712875C127413603 @default.
- W65712875 hasConceptScore W65712875C136525101 @default.
- W65712875 hasConceptScore W65712875C142724271 @default.
- W65712875 hasConceptScore W65712875C145148216 @default.
- W65712875 hasConceptScore W65712875C171250308 @default.
- W65712875 hasConceptScore W65712875C178635117 @default.
- W65712875 hasConceptScore W65712875C178790620 @default.
- W65712875 hasConceptScore W65712875C184779094 @default.
- W65712875 hasConceptScore W65712875C185592680 @default.
- W65712875 hasConceptScore W65712875C19067145 @default.
- W65712875 hasConceptScore W65712875C191897082 @default.
- W65712875 hasConceptScore W65712875C192562407 @default.
- W65712875 hasConceptScore W65712875C198291218 @default.
- W65712875 hasConceptScore W65712875C203311528 @default.
- W65712875 hasConceptScore W65712875C204787440 @default.
- W65712875 hasConceptScore W65712875C22423302 @default.
- W65712875 hasConceptScore W65712875C30403606 @default.
- W65712875 hasConceptScore W65712875C38652104 @default.
- W65712875 hasConceptScore W65712875C41008148 @default.
- W65712875 hasConceptScore W65712875C43617362 @default.
- W65712875 hasConceptScore W65712875C544778455 @default.
- W65712875 hasConceptScore W65712875C61427134 @default.
- W65712875 hasConceptScore W65712875C62520636 @default.
- W65712875 hasConceptScore W65712875C71924100 @default.
- W65712875 hasConceptScore W65712875C78519656 @default.
- W65712875 hasConceptScore W65712875C82706917 @default.
- W65712875 hasIssue "1" @default.
- W65712875 hasLocation W657128751 @default.
- W65712875 hasOpenAccess W65712875 @default.
- W65712875 hasPrimaryLocation W657128751 @default.
- W65712875 hasRelatedWork W1483697497 @default.
- W65712875 hasRelatedWork W1917749317 @default.
- W65712875 hasRelatedWork W1979850774 @default.
- W65712875 hasRelatedWork W1980361424 @default.
- W65712875 hasRelatedWork W1985260113 @default.
- W65712875 hasRelatedWork W1986258080 @default.
- W65712875 hasRelatedWork W2054082006 @default.
- W65712875 hasRelatedWork W2057346748 @default.
- W65712875 hasRelatedWork W2070235464 @default.
- W65712875 hasRelatedWork W2083543092 @default.