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• W657263116 abstract "Zirconium nitride (ZrN) thin films are irradiated with 800 keV energetic carbon (C) ions in a 5UDH-Pelletron accelerator and the ions irradiation induced effects are investigated. The films are irradiated at various C ions fluences, ranging from 1013 to 1015 ions/cm2. The scanning electron microscopy study of the films indicates the development of zirconium (Zr) nanoparticles at ions irradiated region. X-ray diffraction (XRD) patterns of C ions irradiated films also show the formation of (100) and (002) oriented nanocrystalline metallic Zr phases. The irradiated films spectra depict a shift in ZrN peaks towards higher 2θ values, exhibiting that C ions bombardment induces compressive stress in the irradiated films. The appearance of C related peaks in Fourier transform infrared (FTIR) spectra confirms the incorporation of C atoms into ZrN film. Compressive stress has been calculated from the IR peak shift which indicates that higher ion dose (≥5×1014 ions/cm2) produce lower compressive stress relative to the lower ions fluences. Effect of ion dose on the film resistivity is also reported." @default.
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• W657263116 date "2015-11-01" @default.
• W657263116 modified "2023-10-11" @default.
• W657263116 title "Carbon ions irradiation induced modifications in structural and electrical resistivity characteristics of ZrN thin films" @default.
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• W657263116 doi "https://doi.org/10.1016/j.mssp.2015.05.062" @default.
• W657263116 hasPublicationYear "2015" @default.
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