Matches in SemOpenAlex for { <https://semopenalex.org/work/W657367006> ?p ?o ?g. }
Showing items 1 to 91 of
91
with 100 items per page.
- W657367006 abstract "Uniformly thin single-crystal films of silicon produced by modification of fluidized-bed-reactor technique producing polysilicon by chemical vapor deposition. Proposed for silicon wafers for flat-plate solar arrays and results in different structural and electronic properties in deposition layer desirable for specific microelectronic or solar-cell processing. In process deposition occurs on silicon wafers, kept individually at temperatures above 1,000 degree C. Heated wafers held in unheated and minimally-agitated-fluidized bed of silicon particles and in low concentration of silane." @default.
- W657367006 created "2016-06-24" @default.
- W657367006 creator A5020905076 @default.
- W657367006 creator A5065932140 @default.
- W657367006 date "1988-02-01" @default.
- W657367006 modified "2023-09-28" @default.
- W657367006 title "Fluidized-Bed Deposition Of Single-Crystal Silicon" @default.
- W657367006 hasPublicationYear "1988" @default.
- W657367006 type Work @default.
- W657367006 sameAs 657367006 @default.
- W657367006 citedByCount "0" @default.
- W657367006 crossrefType "journal-article" @default.
- W657367006 hasAuthorship W657367006A5020905076 @default.
- W657367006 hasAuthorship W657367006A5065932140 @default.
- W657367006 hasConcept C127413603 @default.
- W657367006 hasConcept C151730666 @default.
- W657367006 hasConcept C159985019 @default.
- W657367006 hasConcept C160671074 @default.
- W657367006 hasConcept C178790620 @default.
- W657367006 hasConcept C185592680 @default.
- W657367006 hasConcept C187937830 @default.
- W657367006 hasConcept C192562407 @default.
- W657367006 hasConcept C2084832 @default.
- W657367006 hasConcept C26953177 @default.
- W657367006 hasConcept C2776390347 @default.
- W657367006 hasConcept C2778024649 @default.
- W657367006 hasConcept C2779227376 @default.
- W657367006 hasConcept C2779667780 @default.
- W657367006 hasConcept C2780565262 @default.
- W657367006 hasConcept C2816523 @default.
- W657367006 hasConcept C42360764 @default.
- W657367006 hasConcept C49040817 @default.
- W657367006 hasConcept C544956773 @default.
- W657367006 hasConcept C57410435 @default.
- W657367006 hasConcept C64297162 @default.
- W657367006 hasConcept C80086925 @default.
- W657367006 hasConcept C86803240 @default.
- W657367006 hasConcept C87359718 @default.
- W657367006 hasConceptScore W657367006C127413603 @default.
- W657367006 hasConceptScore W657367006C151730666 @default.
- W657367006 hasConceptScore W657367006C159985019 @default.
- W657367006 hasConceptScore W657367006C160671074 @default.
- W657367006 hasConceptScore W657367006C178790620 @default.
- W657367006 hasConceptScore W657367006C185592680 @default.
- W657367006 hasConceptScore W657367006C187937830 @default.
- W657367006 hasConceptScore W657367006C192562407 @default.
- W657367006 hasConceptScore W657367006C2084832 @default.
- W657367006 hasConceptScore W657367006C26953177 @default.
- W657367006 hasConceptScore W657367006C2776390347 @default.
- W657367006 hasConceptScore W657367006C2778024649 @default.
- W657367006 hasConceptScore W657367006C2779227376 @default.
- W657367006 hasConceptScore W657367006C2779667780 @default.
- W657367006 hasConceptScore W657367006C2780565262 @default.
- W657367006 hasConceptScore W657367006C2816523 @default.
- W657367006 hasConceptScore W657367006C42360764 @default.
- W657367006 hasConceptScore W657367006C49040817 @default.
- W657367006 hasConceptScore W657367006C544956773 @default.
- W657367006 hasConceptScore W657367006C57410435 @default.
- W657367006 hasConceptScore W657367006C64297162 @default.
- W657367006 hasConceptScore W657367006C80086925 @default.
- W657367006 hasConceptScore W657367006C86803240 @default.
- W657367006 hasConceptScore W657367006C87359718 @default.
- W657367006 hasIssue "2" @default.
- W657367006 hasLocation W6573670061 @default.
- W657367006 hasOpenAccess W657367006 @default.
- W657367006 hasPrimaryLocation W6573670061 @default.
- W657367006 hasRelatedWork W1618988897 @default.
- W657367006 hasRelatedWork W1634455219 @default.
- W657367006 hasRelatedWork W164705526 @default.
- W657367006 hasRelatedWork W1991823894 @default.
- W657367006 hasRelatedWork W2106121987 @default.
- W657367006 hasRelatedWork W2160467346 @default.
- W657367006 hasRelatedWork W2217596594 @default.
- W657367006 hasRelatedWork W2321618373 @default.
- W657367006 hasRelatedWork W2389143489 @default.
- W657367006 hasRelatedWork W2474849245 @default.
- W657367006 hasRelatedWork W2561653321 @default.
- W657367006 hasRelatedWork W1016146836 @default.
- W657367006 hasRelatedWork W1595125566 @default.
- W657367006 hasRelatedWork W1691536918 @default.
- W657367006 hasRelatedWork W2754738523 @default.
- W657367006 hasRelatedWork W2847196708 @default.
- W657367006 hasRelatedWork W2924361000 @default.
- W657367006 hasRelatedWork W3071259238 @default.
- W657367006 hasRelatedWork W3147228700 @default.
- W657367006 hasRelatedWork W3148590531 @default.
- W657367006 hasVolume "12" @default.
- W657367006 isParatext "false" @default.
- W657367006 isRetracted "false" @default.
- W657367006 magId "657367006" @default.
- W657367006 workType "article" @default.