Matches in SemOpenAlex for { <https://semopenalex.org/work/W657471535> ?p ?o ?g. }
Showing items 1 to 73 of
73
with 100 items per page.
- W657471535 abstract "1. Lithography and Relief Formation and their Technological Applications.Polygraphy and reproduction techniques. Electronics and microelectronics. Contemporary trends of development of lithography and materials lithographic. 2. Physical and Physico-Chemical Principles of Lithographic Techniques and Processes. Light radiation and photolithography. Electron-beam radiation and electron-beam lithography. X-ray radiation and X-ray lithography. Ion-beam lithography. Hybrid lithography. Side effects of radiation. Technological processes. 3. Interaction of Ionizing Radiation with Atoms, Molecules and Polymers. Propagation of radiation in matter. Means of ionizing radiation energy transfer to irradiated matter and its consequences. Mechanism of interaction of ionizing radiation with polymers. Description of crosslinking and scission reactions. Parameters affecting the polymer sensitivity to ion-beam radiation. 4. Resists for Technological Applications. Electron-beam and X-ray resists. Materials for electron-beam resists. Positive photoresists. Negative photoresists. Photoresists for special applications. 5. Special Lithographic Techniques and Materials. Lithographic systems with multilayer resists. Plasma etching. Dry lithography. Contemporary commercial resists. Lithography and relief formation and their technological applications. Subject index." @default.
- W657471535 created "2016-06-24" @default.
- W657471535 creator A5068408091 @default.
- W657471535 creator A5081189405 @default.
- W657471535 creator A5089794935 @default.
- W657471535 date "1993-01-01" @default.
- W657471535 modified "2023-10-17" @default.
- W657471535 title "Resists in microlithography and printing" @default.
- W657471535 hasPublicationYear "1993" @default.
- W657471535 type Work @default.
- W657471535 sameAs 657471535 @default.
- W657471535 citedByCount "2" @default.
- W657471535 crossrefType "book" @default.
- W657471535 hasAuthorship W657471535A5068408091 @default.
- W657471535 hasAuthorship W657471535A5081189405 @default.
- W657471535 hasAuthorship W657471535A5089794935 @default.
- W657471535 hasConcept C105487726 @default.
- W657471535 hasConcept C120665830 @default.
- W657471535 hasConcept C121332964 @default.
- W657471535 hasConcept C162996421 @default.
- W657471535 hasConcept C163581340 @default.
- W657471535 hasConcept C171250308 @default.
- W657471535 hasConcept C187937830 @default.
- W657471535 hasConcept C192562407 @default.
- W657471535 hasConcept C200274948 @default.
- W657471535 hasConcept C204223013 @default.
- W657471535 hasConcept C2779227376 @default.
- W657471535 hasConcept C2781048479 @default.
- W657471535 hasConcept C41794268 @default.
- W657471535 hasConcept C49040817 @default.
- W657471535 hasConcept C53524968 @default.
- W657471535 hasConceptScore W657471535C105487726 @default.
- W657471535 hasConceptScore W657471535C120665830 @default.
- W657471535 hasConceptScore W657471535C121332964 @default.
- W657471535 hasConceptScore W657471535C162996421 @default.
- W657471535 hasConceptScore W657471535C163581340 @default.
- W657471535 hasConceptScore W657471535C171250308 @default.
- W657471535 hasConceptScore W657471535C187937830 @default.
- W657471535 hasConceptScore W657471535C192562407 @default.
- W657471535 hasConceptScore W657471535C200274948 @default.
- W657471535 hasConceptScore W657471535C204223013 @default.
- W657471535 hasConceptScore W657471535C2779227376 @default.
- W657471535 hasConceptScore W657471535C2781048479 @default.
- W657471535 hasConceptScore W657471535C41794268 @default.
- W657471535 hasConceptScore W657471535C49040817 @default.
- W657471535 hasConceptScore W657471535C53524968 @default.
- W657471535 hasLocation W6574715351 @default.
- W657471535 hasOpenAccess W657471535 @default.
- W657471535 hasPrimaryLocation W6574715351 @default.
- W657471535 hasRelatedWork W150677894 @default.
- W657471535 hasRelatedWork W1532976563 @default.
- W657471535 hasRelatedWork W158269876 @default.
- W657471535 hasRelatedWork W178758932 @default.
- W657471535 hasRelatedWork W1969767955 @default.
- W657471535 hasRelatedWork W1981367939 @default.
- W657471535 hasRelatedWork W2004722766 @default.
- W657471535 hasRelatedWork W2024307209 @default.
- W657471535 hasRelatedWork W2028463086 @default.
- W657471535 hasRelatedWork W2058472284 @default.
- W657471535 hasRelatedWork W2105374421 @default.
- W657471535 hasRelatedWork W2481995918 @default.
- W657471535 hasRelatedWork W2488891087 @default.
- W657471535 hasRelatedWork W2537268738 @default.
- W657471535 hasRelatedWork W2544074498 @default.
- W657471535 hasRelatedWork W2963545940 @default.
- W657471535 hasRelatedWork W3036050818 @default.
- W657471535 hasRelatedWork W3107017040 @default.
- W657471535 hasRelatedWork W3147299854 @default.
- W657471535 hasRelatedWork W2806557561 @default.
- W657471535 isParatext "false" @default.
- W657471535 isRetracted "false" @default.
- W657471535 magId "657471535" @default.
- W657471535 workType "book" @default.